UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549
                                  SCHEDULE 14A


    PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES EXCHANGE ACT
                           OF 1934 (AMENDMENT NO. __)

         Filed by the Registrant                                       [X]
         Filed by a party other than the Registrant                    [ ]

         Check the appropriate box:

[X] Preliminary Proxy Statement

[ ] Definitive Proxy Statement

[ ] Confidential,for Use of the Commission Only(as permitted by Rule14a-6(e)(2))

[ ] Definitive Additional Materials

[ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                            NANOMETRICS INCORPORATED
           ----------------------------------------------------------
                (Name of Registrant as Specified in its Charter)

           ----------------------------------------------------------
     (Name of Person(s) Filing Proxy Statement if other than the Registrant)

         Payment of Filing Fee (Check the appropriate box):
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             pursuant to Exchange Act Rule 0-11 (Set forth the amount on which
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    Rule 0-11(a)(2) and identify the filing for which the offsetting fee was
    paid previously. Identify the previous filing by registration statement
    number, or the Form or Schedule and the date of its filing.
         (1) Amount Previously Paid:
         (2) Form, Schedule or Registration Statement No.:
         (3) Filing Party:
         (4) Date Filed:





                            NANOMETRICS INCORPORATED

                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS


TO THE SHAREHOLDERS OF NANOMETRICS INCORPORATED:

     NOTICE  IS  HEREBY  GIVEN  that  the  annual  meeting  of  shareholders  of
Nanometrics Incorporated, a California corporation (the "Company"), will be held
on Friday,  August 26, 2005 at 1:00 p.m., local time, at the Company's principal
offices located at 1550 Buckeye Drive, Milpitas, California 95035. At the annual
meeting, you will be asked to consider and vote upon the following:

     1. A proposal to elect seven candidates nominated by the board of directors
to serve until the next annual meeting of shareholders at which their respective
successors  are elected  and  qualified,  or until the  earlier of their  death,
resignation or removal.

     2. A proposal to approve the  reincorporation of the Company under the laws
of the State of Delaware through a merger with Minor League Merger  Corporation,
a wholly-owned subsidiary of the Company.

     3. A  proposal  to  approve  the  adoption  of the  Company's  2005  Equity
Incentive Plan (the "Plan") and the  reservation  of 1,200,000  shares of common
stock for issuance thereunder.

     4.  A  proposal  to  ratify  the  appointment  of BDO  Seidman,  LLP as the
Company's  independent  registered  public  accounting  firm for the fiscal year
ending December 31, 2005.

     5. Such other  business as may properly  come before the annual  meeting or
any postponements or adjournments thereof.

     The  foregoing  items of  business  are more fully  described  in the proxy
statement accompanying this notice of annual meeting of shareholders.

     Only  shareholders  of record at the close of business on July 12, 2005 are
entitled to notice of and to vote at the annual meeting and any postponements or
adjournments thereof.

     All  shareholders  are  cordially  invited to attend the annual  meeting in
person.  However, to ensure  representation at the annual meeting, you are urged
to mark,  sign,  date and return the enclosed proxy card as promptly as possible
in the  postage-prepaid  envelope enclosed for that purpose.  Any shareholder of
record  attending the annual meeting may vote in person even if that shareholder
previously returned a proxy card for the annual meeting.

                               BY ORDER OF THE BOARD OF DIRECTORS,



                               -------------------
                               Vincent J. Coates
                               Chairman of the Board of Directors and Secretary

Milpitas, California
July__, 2005

                                       2



                            NANOMETRICS INCORPORATED

                                 PROXY STATEMENT

                 INFORMATION CONCERNING SOLICITATION AND VOTING

General

     This proxy  statement is being provided to the  shareholders of Nanometrics
Incorporated  (the  "Company") as part of a solicitation of proxies by the board
of  directors  for use at the 2005 annual  meeting of  shareholders.  This proxy
statement provides shareholders with information they need to know to be able to
vote or instruct their vote to be cast at the annual meeting.

Date, Time and Place

     The annual  meeting  will be held on Friday,  August 26, 2005 at 1:00 p.m.,
local time, at the Company's principal offices of located at 1550 Buckeye Drive,
Milpitas, California 95035.

Purpose; Other Matters

     The annual meeting is being held to consider and vote upon the following:

     1. A proposal to elect seven director nominees to the board of directors to
serve until the next annual meeting of  shareholders  at which their  respective
successors  are elected  and  qualified,  or until the  earlier of their  death,
resignation or removal.

     2. A proposal to approve the  reincorporation of the Company under the laws
of the State of Delaware through a merger with Minor League Merger  Corporation,
a wholly-owned subsidiary of the Company.

     3. A  proposal  to  approve  the  adoption  of the  Company's  2005  Equity
Incentive Plan (the "Plan") and the  reservation  of 1,200,000  shares of common
stock for issuance thereunder.

     4.  A  proposal  to  ratify  the  appointment  of BDO  Seidman,  LLP as the
Company's  independent  registered  public  accounting  firm for the fiscal year
ending December 31, 2005.

     Shareholders  will  also be  asked to  consider  and  vote  upon any  other
business as may properly come before the annual meeting or any  adjournments  or
postponements of the annual meeting. The Company does not expect that any matter
other  than the  proposals  presented  in this proxy  statement  will be brought
before the annual meeting.  However, if other matters incident to the conduct of
the  annual  meeting  are  properly  presented  at  the  annual  meeting  or any
adjournment or postponement of the annual meeting,  the persons named as proxies
will vote in accordance with their best judgment with respect to those matters.

     If you vote "AGAINST" any of the  proposals,  the proxy holders will not be
authorized to vote for any  adjournments or postponements of the annual meeting,
including  for the  purpose  of  soliciting  additional  proxies,  unless you so
indicate  by  marking  the  appropriate  box on the  proxy  card for the  annual
meeting.

Recommendation of the Board of Directors

     The board of directors unanimously recommends that you vote:

     o    "FOR" the proposal to elect seven candidates nominated by the board of
          directors to serve until the next annual  meeting of  shareholders  at
          which their respective successors are elected and qualified,  or until
          the earlier of their death, resignation or removal.;

     o    "FOR" the proposal to approve the reincorporation of the Comapny under
          the laws of the State of Delaware  through a merger with Minor  League
          Merger Corporation,  a wholly-owned subsidiary of the Company;

                                       3




     o    "FOR"  the  proposal  to  approve  the  adoption  of the  Plan and the
          reservation   of  1,200,000   shares  of  common  stock  for  issuance
          thereunder; and

     o    "FOR" the proposal to ratify the  appointment  of BDO Seidman,  LLP as
          the Company's  independent  registered  public accounting firm for the
          fiscal year ending December 31, 2005.

Record Date; Outstanding Shares; Voting Rights

     Only  holders  of record of common  stock at the close of  business  on the
record date for the annual meeting, July 12, 2005, are entitled to notice of and
to vote at the annual  meeting.  As of the record  date,  there were  12,793,207
shares of common stock  outstanding  and entitled to vote at the annual meeting,
held by approximately 140 holders of record.  Each record holder of common stock
on the record date is  entitled to one vote for each share of common  stock held
as of the record date with respect to all  proposals  except with respect to the
election of directors.

     The  candidates  receiving the seven highest vote totals will be elected to
the board of directors.  Every shareholder  voting for the election of the board
of  directors  may (i)  cumulate  such  shareholder's  votes  and  give  any one
candidate  a number of votes  equal to the  number of  directors  to be  elected
multiplied  by the number of shares that such  shareholders  holds on the record
date for the annual meeting,  or (ii) distribute such shareholder's votes on the
same principle among as many candidates as the shareholder may select,  provided
that  votes  cannot  be  cast  for  more  than  seven  candidates.  However,  no
shareholder  will be  entitled  to  cumulate  votes for a  candidate  unless the
candidate's  name has been  placed in  nomination  prior to the  voting  and the
shareholder,  or any other  shareholder,  has given notice at the annual meeting
prior to the voting of the intention to cumulate votes.

     A list of  shareholders  will be available for review at the annual meeting
and at the Company's  executive  offices of during regular  business hours for a
period of ten days before the annual meeting.

Admission to the Annual Meeting

     Only  shareholders,  their designated proxies and guests of the Company may
attend the annual meeting.  If you plan to attend the annual meeting and wish to
vote in person,  you will be given a ballot at the annual meeting.  Please note,
however,  that if your shares are held in "street name," which means your shares
are held of record by a broker,  bank or other nominee,  and you wish to vote at
the annual  meeting,  you must bring to the annual  meeting a "legal proxy" from
the  record  holder of your  shares  authorizing  you to attend  and vote at the
annual meeting.

Quorum and Vote Required

     A quorum of  shareholders  is necessary  to hold a valid annual  meeting of
shareholders.  In order to have a quorum for the  transaction of business at the
annual meeting,  a majority of shares of common stock issued and outstanding and
entitled to vote on the record date must be present in person or by proxy at the
annual meeting.  Shares that are voted "FOR," "AGAINST,"  "ABSTAIN" or "WITHHOLD
AUTHORITY"  a matter are  treated as being  present  at the annual  meeting  for
purposes of establishing a quorum.

     In addition, the vote required to approve each proposal is as follows:

     Proposal 1

     The candidates for the board of directors  receiving the seven highest vote
totals will be elected to serve as directors of the Company.

     Proposal 2

     Approval of the reincorporation merger will require the affirmative vote of
the holders of a majority of the outstanding  shares of common stock entitled to
vote on the record date.

                                       4



     Proposal 3

     Approval  of the Plan and the  reservation  of shares  of common  stock for
issuance  thereunder  will  require  the  affirmative  vote of the  holders of a
majority  of the shares of common  stock  represented  in person or by proxy and
voting at the annual meeting.

     Proposal 4

     Approval by the shareholders of the selection of the independent registered
public accounting firm is not required,  but the audit committee  believes it is
desirable as a matter of good corporate  governance to submit this matter to the
shareholders.  If holders of a majority  of the  common  stock  represented  and
voting at the annual meeting do not ratify the  appointment of BDO Seidman,  LLP
as the Company's  independent  registered  public accounting firm for the fiscal
year ending  December 31, 2005,  the audit  committee  will consider  whether it
should select another independent registered public accounting firm.

Voting

General

     Shareholders  of  record as of the  record  date may vote  their  shares by
attending the annual meeting and voting their shares in person or by completing,
signing  and dating  their  respective  proxy  cards for the annual  meeting and
mailing  them in the  postage  pre-paid  envelope  enclosed  for  that  purpose.
Shareholders  holding  shares of common stock in "street name," which means that
their shares are held of record by a broker, bank, or other nominee, may vote by
mail by  completing,  signing  and dating the voting  instruction  forms for the
annual meeting  provided by their respective  brokers,  banks, or other nominees
and returning their respective voting instruction forms to the record holders of
their shares of common stock. Even if you plan to attend the annual meeting, the
Company  recommends that you vote by proxy prior to the annual meeting.  You can
always change your vote as described below.

Voting by Proxy

     All properly executed proxies that are received prior to the annual meeting
and  not  revoked  will  be  voted  at  the  annual  meeting  according  to  the
instructions  indicated on the  proxies.  If your proxy does not specify how you
wish the Company to vote your shares, your shares will be voted:

     o    "FOR" the proposal to elect seven candidates nominated by the board of
          directors to serve until the next annual  meeting of  shareholders  at
          which their respective successors are elected and qualified,  or until
          the earlier of their death, resignation or removal.

     o    "FOR" the proposal to approve the reincorporation of the Company under
          the laws of the State of Delaware  through a merger with Minor  League
          Merger Corporation, a wholly-owned subsidiary of the Company;

     o    "FOR"  the  proposal  to  approve  the  adoption  of the  Plan and the
          reservation   of  1,200,000   shares  of  common  stock  for  issuance
          thereunder; and

     o    "FOR" the proposal to ratify the  appointment  of BDO Seidman,  LLP as
          the Company's  independent  registered  public accounting firm for the
          fiscal year ending December 31, 2005.

     You may  receive  more than one proxy card  depending  on how you hold your
shares of common stock. Generally, you need to sign and return all of your proxy
cards to vote all of your  shares.  For  example,  if you  hold  shares  through
someone else, such as a broker, you may get proxy material from that person.

Changing Your Vote

         If you are the record holder of your shares of common stock, you can
change your vote at any time before your proxy is voted at the annual meeting
by:

     o    delivering  to the  Company's  corporate  secretary a signed notice of
          revocation;

                                       5



     o    granting the proxy  holders a new,  later-dated  proxy,  which must be
          signed and delivered to the Company's  corporate  secretary in advance
          of the vote at the annual meeting; or

     o    attending the annual meeting and voting in person.

     Your attendance  alone,  however,  will not revoke your previously  granted
proxy.  If you hold  your  shares in street  name and you have  provided  voting
instructions to your broker,  bank or other nominee for the annual meeting,  you
must follow the instructions  provided by your broker,  bank or other nominee in
order to change your vote or revoke your proxy for the annual meeting.

Abstentions and Broker Non-Votes

     An abstention occurs when a shareholder attends a meeting, either in person
or by proxy, but abstains from voting. While there is no definitive statutory or
case law authority in California as to the proper treatment of abstentions,  the
Company believes that abstentions  should be counted for purposes of determining
both (i) the presence or absence of a quorum for the transaction of business and
(ii) the total  number of shares of common  stock  represented  and voting  with
respect to a proposal.  In the absence of controlling authority to the contrary,
the Company intends to treat abstentions in this manner.

     "Broker  non-votes"  are shares held by a broker or other  nominee that are
represented  at the  annual  meeting,  but with  respect  to which the broker or
nominee is not instructed by the  beneficial  owner of the shares to vote on the
particular  proposal and the broker does not have discretionary  voting power on
the proposal.  Broker  non-votes will be counted for purposes of determining the
presence  or  absence  of a quorum  but  will not be  counted  for  purposes  of
determining  the  number of shares  represented  and  voting  with  respect to a
proposal.

     For  proposal 1, neither  abstentions  nor broker  non-votes  will have any
effect on the election of the seven directors.

     For proposal 2,  abstentions and broker non-votes will have the same effect
as voting against approval of the reincorporation merger.

     For proposal 3, abstentions will have the same effect as voting against the
approval of the Plan and the  reservation of shares of common stock for issuance
thereunder; broker non-votes will have no effect.

     For  proposal 4,  abstentions  will have the same effect as voting  against
ratification of the appointment of BDO Seidman, LLP as the Company's independent
registered  public accounting firm for the fiscal year ending December 31, 2005;
broker non-votes will have no effect.

Proxy Solicitation

     The  Company  is  soliciting  proxies  for  the  annual  meeting  from  its
shareholders.  The Company will bear the entire cost of soliciting  proxies from
the  shareholders.  In  addition  to the  solicitation  of proxies by mail,  the
Company will request that  brokers,  banks and other  nominees  send proxies and
proxy materials to the beneficial owners of common stock held by them and secure
their voting instructions, if necessary. The Company will reimburse those record
holders for their reasonable  expenses.  The Company also may use several of its
regular  employees,  who will not be specially  compensated,  to solicit proxies
from  shareholders,  either  personally  or by  telephone,  Internet,  telegram,
facsimile or special delivery letter.

Assistance

     If you need  assistance  in  completing  your proxy card or have  questions
regarding  the  annual  meeting,  please  contact  Investor  Relations  at (408)
435-9600 or write to Nanometrics  Incorporated,  1550 Buckeye  Drive,  Milpitas,
California 95035, Attn: Investor Relations.

                                       6



Shareholder Proposals

     The attached proxy card grants the proxy holders discretionary authority to
vote on any matter raised at the 2005 Annual Meeting.  Shareholders are entitled
to present proposals for action at the 2006 Annual Meeting.  For any proposal to
be considered for inclusion in the Company's  proxy  statement and form of proxy
for submission to the shareholders at the 2006 annual meeting, the proposal must
comply  with the  requirements  of Rule  14a-8  under  the  Exchange  Act and be
submitted in writing by notice delivered or mailed by first-class  United States
mail,  postage  prepaid,  to  Nanometrics  Incorporated,   1550  Buckeye  Drive,
Milpitas,  California  95035,  Attention:  Office of the Secretary,  and must be
received no later than 120 calendar days before the date of the proxy  statement
released  to  shareholders  in  connection  with the 2005  annual  meeting.  The
submission of a shareholder proposal does not guarantee that it will be included
in  the  2006  proxy  statement.  Additionally,   shareholder  proposals  to  be
considered at the 2006 annual meeting outside the processes of Rule 14a-8 (which
are not  intended  to be  included  in the proxy  materials  for the 2006 annual
meeting) must be delivered to or mailed and received at the Company's  executive
offices at least 45 days before the date of the proxy  statement  is released to
shareholders in connection with the 2005 annual meeting.

Material Proceedings

     To the best of management's knowledge, there are no material proceedings to
which any  director  or officer is a party and (i) is adverse to the  Company or
any of its  subsidiaries or (ii) has a material  interest adverse to the Company
or any of its subsidiaries.


                                       7


                                   PROPOSAL 1
                       ELECTION OF NANOMETRICS' DIRECTORS

Nominees

     At the 2005 annual meeting of shareholders,  unless  otherwise  instructed,
the proxy holders will vote the proxies  received by them for the seven nominees
named below,  each of whom is presently a director of the Company.  In the event
that any nominee is unable or declines to serve as a director at the time of the
annual  meeting,  the  proxies  will be  voted  for any  nominee  who  shall  be
designated  by the present  board of directors  to fill the  vacancy.  The proxy
holders  intend to vote all  proxies  received  by them in such a manner  and in
accordance with cumulative  voting as will ensure the election of as many of the
nominees listed below as possible and, in such event,  the specific  nominees to
be voted for will be determined by the proxy  holders.  The Company is not aware
of any nominee who will be unable or will decline to serve as a director

     The names of the seven nominees and certain  information about them are set
forth below:


         Name of Nominee                  Age              Director Since
         ---------------                  ---              --------------
         Vincent J. Coates                80                    1975
         John D. Heaton                   45                    1995
         Edmond R. Ward                   65                    1999
         William G. Oldham                66                    2000
         Stephen J Smith                  58                    2004
         J. Thomas Bentley                55                    2004
         Norman V. Coates                 55                    2004



     Vincent J.  Coates has been  Chairman  of the Board  since the  Company was
founded in 1975. He has been the Company's  Secretary  since  February  1989. He
also served as Chief Executive Officer through April 1998 and President from the
Company's  founding  through  May 1996,  except for the  period of January  1986
through February 1987 when he served exclusively as Chief Executive Officer. Mr.
Coates has also  served as Chairman of the Board of  Nanometrics  Japan Ltd.,  a
subsidiary of the Company,  since its inception in November  1984.  Prior to his
employment at the Company,  Mr. Coates  co-founded  Coates and Welter Instrument
Corporation,  a  designer  of  electron  microscopes,  the  assets of which were
subsequently  acquired by the Company.  Mr.  Coates also spent over twenty years
working in engineering,  sales and international operations for the Perkin-Elmer
Corporation,  a manufacturer of analytical instruments.  In 1995, he received an
award which recognized his contribution to the industry from  Semiconductor  and
Equipment and Materials International, an industry trade organization.

     John D.  Heaton has served as a director  of the  Company  since July 1995.
Since April 1998, he has been Chief Executive  Officer of the Company.  From May
1996 to April 1998,  he served as the Company's  President  and Chief  Operating
Officer.  Mr. Heaton has also served as President of  Nanometrics  Japan Ltd., a
subsidiary of the Company,  since January  1998.  Beginning in 1978,  Mr. Heaton
served in various technical positions at National Semiconductor, a semiconductor
manufacturer, and prior to joining the Company in 1990.

     Edmond R. Ward has served as a  director  of the  Company  since July 1999.
Beginning in January  2002,  Mr. Ward has served as Chief  Technical  Officer of
Unity  Semiconductor,  a semiconductor design and manufacturing  company.  Since
April 1999, Mr. Ward has been a General Partner of Virtual  Founders,  a venture
capital firm.  From April 1992 to June 1997,  Mr. Ward was the Vice President of
Technology  at  Silicon  Valley  Group,  Inc.,  a supplier  of wafer  processing
equipment.

     William G. Oldham has served as a director of the Company  since June 2000.
Since  1964,  Mr.  Oldham  has  been  a  faculty  member  at the  University  of
California,  Berkeley,  where he researches  EUV and Maskless  Lithography  and,
since 1996, has been the Director of the DARPA/SRC Research Network for Advanced
Lithography.  He has served as a  consultant  in various  intellectual  property
matters and serves on the board of directors of Cymer, Inc., a supplier of light
sources  for  deep  ultraviolet  (DUV)  photolithography  systems  used  in  the
manufacturing of semiconductors.


                                       8



     Stephen J Smith has served as a director of the  Company  since April 2004.
Dr.  Smith has been a professor  in the  Department  of  Molecular  and Cellular
Physiology at the Stanford  University  School of Medicine since 1989,  where he
researches brain  development and function with special interests in the dynamic
and structural aspects of synapse and circuit formation and synaptic plasticity.
Dr. Smith is the author of numerous  research articles in the fields of cellular
and molecular neuroscience.

     J. Thomas Bentley has served as a director of the Company since April 2004.
Mr.  Bentley  is  a  co-founder  of  Alliant  Partners,  a  leading  merger  and
acquisition firm for emerging and mid-market technology companies.  For the past
10 years, Mr. Bentley has worked with some of Alliant's largest clients on their
strategic acquisitions and divestitures.  His expertise is in financial, tax and
accounting  structuring  of merger  transactions.  Mr. Bentley holds a Master of
Science  degree in  Management  from  M.I.T.  and  currently  serves as a senior
advisor to Alliant Partners.

     Norman V. Coates  served as a director of the Company from May 1988 through
June 2001.  He was  re-appointed  to the board of directors on June 30, 2004. He
has operated Gem of the River Produce,  a farming and produce packing  operation
in  Orleans,  California,  as a sole  proprietor  since  1978.  He has also been
manager  of the Boise  Creek Farm  operation  since 1985 and a manager of Coates
Vineyards since 1997.

     The candidates for the board of directors  receiving the seven highest vote
totals  will be elected to serve as  directors  of the  Company.  The  directors
elected at the annual  meeting will serve until the next annual meeting or until
such director's successor has been elected or qualified.

THE BOARD OF DIRECTORS UNANIMOUSLY RECOMMENDS THAT THE SHAREHOLDERS VOTE "FOR"
THE SEVEN NOMINEES SET FORTH HEREIN.


                                       9


Security Ownership of Management and Certain Beneficial Owners

     The following table sets forth beneficial  ownership of common stock of the
Company as of July 12, 2005,  the record date, by each  director or nominee,  by
each of the Named  Officers  (as defined in the section of this proxy  statement
entitled  "Compensation  of  Executive  Officers"  beginning on page __), by all
directors and Named Officers as a group, and by all persons known to the Company
to be the  beneficial  owners of more  than 5% of the  Company's  common  stock.
Quentin  Wright and Michael Weber are not listed on the table below because they
did not join the Company in their  capacities as executive  officers until after
January 1, 2005 and are not Named  Officers.  Unless  otherwise  indicated,  all
persons  named below can be reached at  Nanometrics  Incorporated,  1550 Buckeye
Drive, Milpitas, California 95035.




                                                                                      Number of Shares
                                                                                      of Common Stock
                                                                                        Beneficially
         Name of Beneficial Owner                                                         Owned(1)        Percent of Total
         ------------------------                                                         --------        ----------------
                                                                                                        
         Vincent J. Coates(2)                                                            3,376,274              26.4%
         Artemis Investment Management LLC(3)                                              881,800               6.9%
              437 Madison Avenue
              New York, New York 10022
         Dimensional Fund Advisors Inc.(4)                                                 913,148               7.1%
              1299 Ocean Avenue
              11th Floor
              Santa Monica, CA 90401
         John D. Heaton(5)                                                                 365,000               2.8%
         Edmond R. Ward(6)                                                                  32,000                  *
         William G. Oldham(7)                                                               30,000                  *
         Paul B. Nolan(8)                                                                   28,334                  *
         Roger Ingalls, Jr. (9)                                                             22,667                  *
         Stephen J Smith (10)                                                                3,333                  *
         J. Thomas Bentley (11)                                                              3,333                  *
         Norman V. Coates (12)                                                               3,333                  *
         All Named Officers and directors as a group (nine(9)persons) (13)               5,659,222              44.2%



*    Represents less than 1% of outstanding shares of common stock.

(1)  Beneficial  ownership is  determined  in  accordance  with the rules of the
     Securities and Exchange Commission. The number of shares beneficially owned
     by a person includes shares of common stock subject to options held by that
     person that are currently exercisable or exercisable within 60 days of July
     12,  2005.  Such  shares  issuable  pursuant  to such  options  are  deemed
     outstanding  for computing the  percentage  ownership of the person holding
     such options but are not deemed  outstanding  for the purposes of computing
     the percentage ownership of each other person.

(2)  Includes  3,376,154 shares of common stock held of record by the Vincent J.
     Coates Separate  Property Trust,  U/D/T dated August 7, 1981, for which Mr.
     Coates acts as trustee.

(3)  According to a Schedule 13G filed on February 10, 2004,  Artemis Investment
     Management LLC may be deemed to be the  beneficial  owner of 881,800 shares
     of common stock.

(4)  According to a Schedule 13G/A filed on February 9, 2005,  Dimensional  Fund
     Advisors Inc. may be deemed to be the beneficial owner of 913,148 shares of
     common stock.

(5)  Includes   365,000  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(6)  Includes   30,000  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(7)  Includes   30,000  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(8)  Includes   23,334  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.


                                       10


(9)  Includes   22,667  shares  of  common  stock   issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

(10) Includes 3,333 shares of common stock issuable upon exercise of outstanding
     options exercisable within 60 days of July 12, 2005.

(11) Includes 3,333 shares of common stock issuable upon exercise of outstanding
     options exercisable within 60 days of July 12, 2005.

(12) Includes 3,333 shares of common stock issuable upon exercise of outstanding
     options exercisable within 60 days of July 12, 2005.

(13) Includes   481,000  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of July 12, 2005.

Board Meetings and Committees

     The board of  directors  met (or acted by written  consent) a total of nine
(9) times during fiscal year ended January 1, 2005. During the fiscal year ended
January 1, 2005,  all incumbent  directors  attended at least 75% of meetings of
the board of  directors  and  meetings of  committees,  if any,  upon which such
directors served.  The standing  committees of the board of directors include an
audit    committee,    a    compensation/stock    option    committee    and   a
nominating/governance committee.

     The board of directors has  determined  that all of its directors  meet the
independence  requirements of the Nasdaq National Market,  with the exception of
Vincent J. Coates, Norman V. Coates and John D. Heaton.

     It is the  policy of the  Company to require  its  directors  to attend its
annual meetings absent a valid reason,  such as a schedule conflict.  All of the
directors  who  served on the board of  directors  for the  entire  fiscal  year
attended the 2004 annual meeting of shareholders.

Audit Committee

     The audit  committee  of the board of  directors  reviews and  monitors the
Company's  financial  reporting as well as its  internal  and  external  audits,
including  among  other  things,   the  Company's  internal  audit  and  control
functions, the results and scope of the annual audit and other services provided
by the Company's independent  auditors,  and the Company's compliance with legal
matters that may have a significant  impact on the Company's  financial reports.
In  addition,  the  audit  committee  has the  responsibility  to  consider  and
recommend the employment of, and to review fee arrangements  with, the Company's
independent auditors. The audit committee also monitors transactions between the
Company and its officers, directors and employees for any potential conflicts of
interest.  The audit committee met (or acted by written  consent) five (5) times
during the fiscal year ended January 1, 2005.

     The members of the audit committee  during the fiscal year ended January 1,
2005 were William Oldham, Nathaniel Brenner (through March 2004), Edmond R. Ward
and J.  Thomas  Bentley  (beginning  in April  2004).  Mr.  Brenner,  the  audit
committee's  financial expert in the fiscal year ended January 3, 2004, resigned
his position as director as well as his  committee  assignments  effective as of
March 2004. At the recommendation of the  nominating/governance  committee,  the
board of directors  appointed J. Thomas Bentley to the audit committee as of May
26, 2004.  Mr.  Bentley was  appointed by the board of directors to serve as the
audit committee's financial expert and chairman.

     Each member of the Company's audit  committee is an "independent  director"
as that term is defined under the  applicable  Nasdaq  National  Market  listing
standards. The audit committee has adopted a written charter, which is available
on the Company's website at www.nanometrics.com.

Compensation/Stock Option Committee

     The  compensation/stock  option committee reviews and makes recommendations
to the board of directors  regarding the Company's  compensation  policy and all
forms of compensation to be provided to certain of the executive officers of the
Company, including the chief executive officer.


                                       11


     The  compensation/stock  option  committee is responsible for approving the
grant of stock  options to the  Company's  employees  under the  Company's  2000
Employee Stock Option Plan and 2002 Nonstatutory Stock Option Plan.

     The  members  of the  compensation/stock  option  committee  serving in the
fiscal year ended January 1, 2005 were Edmond Ward, J. Thomas Bentley, Stephen J
Smith  and  Nathaniel  Brenner.  Mr.  Ward  was  appointed  as  chairman  of the
compensation/stock  option  committee  by the board of  directors.  As indicated
above,  Mr.  Brenner  resigned his position as director as well as his committee
assignments effective as of March 2004. The compensation/stock  option committee
met (or acted by  written  consent)  seven (7) times  during  fiscal  2004.  The
compensation/stock  option  committee  has adopted a written  charter,  which is
available on the Company's website at www.nanometrics.com.

Nominating/Corporate Governance Committee

     The Company maintains a standing nominating/corporate  governance committee
that assists the board of directors in identifying and qualifying  candidates to
join the board of directors and addressing governance issues. All members of the
nominating  committee  are  independent.  The  nominating  committee  utilizes a
variety of methods for identifying and evaluating  nominees.  Its general policy
is to assess the  appropriate  size of the board of  directors  and  whether any
vacancies  are  expected  due to  retirement  or  otherwise.  In the event those
vacancies are anticipated,  or otherwise  arise,  the nominating  committee will
consider  recommending  various  potential  candidates  to fill such  vacancies.
Candidates  may come to the attention of the  nominating  committee  through its
current  members,  shareholders  or other  persons.  The board of directors  may
consider properly submitted shareholder nominations for candidacy.  Nominees may
be submitted by shareholders  in accordance  with the shareholder  communication
policy described below.

     The  nominating/corporate  governance  committee  has no specific,  minimum
qualifications for director candidates.  In general, however, persons considered
for board of directors positions must have demonstrated leadership capabilities,
be of  sound  mind and high  moral  character,  have no  personal  or  financial
interest  that would  conflict or appear to conflict  with the  interests of the
Company  and be  willing  and able to  commit  the  necessary  time for board of
directors and committee service.

     The  nominating/corporate  governance committee believes that board members
should  represent  a  balance  of  diverse  backgrounds  and  skills,  including
marketing,  finance,  manufacturing,  engineering,  science,  and  international
experience.  The  nominating/corporate  governance committee consists of William
Oldham  and  Stephen  Smith.  Mr.  Oldham  was  appointed  as  chairman  of  the
nominating/corporate  governance  committee  by  the  board  of  directors.  The
nominating/corporate  governance  committee  met once in the  fiscal  year ended
January 1, 2005 and has adopted a written  charter,  which is  available  on the
Company's website at www.nanometrics.com.

Shareholder Communication Policy

     The board of directors has established a formal process for shareholders to
send  communications to the board of directors or to individual  directors.  The
names of all directors are available to shareholders in this proxy statement. If
the Company receives any shareholder  communication  intended for the full board
of  directors  or  any  individual  director,   the  Company  will  forward  the
communication to the full board of directors or the individual director,  unless
the  communication  is  clearly  of a  marketing  nature or is  unduly  hostile,
threatening,  illegal or similarly inappropriate,  in which case the Company has
the authority to discard the  communications  or take  appropriate  legal action
regarding the communication.

Compensation/Stock Option Committee Interlocks and Insider Participation

     No member of the compensation/stock option committee of the Company's board
of  directors  serves  as a member  of the board of  directors  or  compensation
committee  of any entity that has one or more  executive  officers  serving as a
member  of  the  Company's  board  of  directors  or  compensation/stock  option
committee.

Compensation of Directors

     Directors  who are not also  employees  of the  Company  receive  an annual
retainer  fee of  $5,000,  plus  $1,000  for each  board and  committee  meeting
attended. Directors are also eligible to participate in the Company's Directors'
Stock Option Plan.  Each audit committee  member  receives an additional  $3,000
annual retainer and $500 for attending


                                       12


quarterly earnings release conference calls.  Additionally,  the audit committee
chairman receives an incremental $2,000 retainer for serving in such capacity.

Compensation of Executive Officers

     The following table sets forth the compensation  paid by the Company during
the past three fiscal years to (i) the chief executive officer, (ii) each of the
four most  highly  compensated  executive  officers  (or such  lesser  number of
executive  officers as the Company may have) of the Company not serving as chief
executive  officer and (iii) up to an additional two individuals that would have
been  included  under item (ii) but for the fact that the  individuals  were not
serving  as  executive  officers  as  of  January  1,  2005,  all  of  whom  are
collectively  referred to as the "Named  Officers".  Quentin  Wright and Michael
Weber are not listed on the table below because they did not join the Company in
their capacities as executive officers until after January 1, 2005.



                           Summary Compensation Table
                                                                                                              Long Term
                                                                                                            Compensation
                                                                                                               Awards
                                                                                                           ---------------
                                                                            Annual Compensation               Securities
                                                               ------------------------------------------     Underlying
Name                                                            Fiscal Year      Salary         Bonus         Options (#)
----------                                                     -------------  -------------  ------------  ----------------
                                                                                                    
John D. Heaton                                                     2004        $   341,800    $   79,314        100,000
   President and Chief Executive Officer                           2003            342,800            --        572,500
                                                                   2002            343,800            --        275,000

Vincent J. Coates                                                  2004        $   204,800            --             --
   Chairman of the Board and Secretary                             2003            204,800            --             --
                                                                   2002            204,800            --             --

Roger Ingalls, Jr.                                                 2004        $   195,265    $   29,658          5,000
   Senior Vice President of Standalone Sales                       2003            198,965            --         31,500
                                                                   2002            201,834            --         25,000

Paul B. Nolan                                                      2004        $   183,055    $   29,864             --
   Vice President and Chief Financial Officer                      2003            179,050            --             --
                                                                   2002            162,234            --         50,000

Stock Options Granted in the Fiscal Year Ended January 1, 2005



     The following  table sets forth  information  with respect to stock options
granted  during  the  fiscal  year  ended  January  1, 2005 to each of the Named
Officers.  Quentin  Wright and  Michael  Weber are not listed on the table below
because they did not join the Company in their capacities as executive  officers
until after January 1, 2005.  All options were granted under the Company's  2000
Stock  Option  Plan.  The  potential  realizable  value  amounts in the last two
columns  of the  following  chart  represent  hypothetical  gains  that could be
achieved for the respective  options if exercised at the end of the option term.
The assumed 5% and 10% annual rates of stock price appreciation from the date of
grant to the end of the option term are provided in accordance with rules of the
Securities and Exchange  Commission and do not represent the Company's  estimate
or projection of the future common stock price.  Actual gains,  if any, on stock
option  exercises are dependent on the future  performance  of the common stock,
overall market conditions and the option holder's  continued  employment through
the vesting period.


                                       13


                                       Option Grants in Last Fiscal Year


                                                    Individual Grants
                               ----------------------------------------------------------------
                               Number of             % of Total                                    Potential Realized Value at
                               Securities            Options                                         Assumed Annual Rates of
                               Underlying            Granted to                                    Stock Price Appreciation for
                               Options               Employees                                             Option Term
                               Granted (#)           in Fiscal      Exercise Price   Expiration    -----------------------------
Name                               (1)                Year (2)          ($/Sh)          Date           5%($)           10%($)
-------                        ----------            ----------     --------------   ----------    -------------   -------------
                                                                                                   
John D. Heaton                 100,000                    22%         $   12.02        5/26/11       $ 332,000       $ 734,000
Vincent J. Coates                    0                     0                 --                             --              --
Roger Ingalls, Jr.               5,000                   1.1%             10.37        8/23/11          14,350          31,650
Paul B. Nolan                        0                     0                 --                             --              --


------------------------------

(1)  All options  granted to the Named  Officers in fiscal 2004 were  granted at
     exercise  prices  equal to the fair market  value of the  Company's  common
     stock  on  the  dates  of  grant.  Historically,   options  granted  become
     exercisable at the rate of 33% on the first  anniversary date of the option
     grant  and  33% of the  total  number  of  option  shares  each  full  year
     thereafter,  such that full  vesting  occurs  three years after the date of
     grant. Options (whether vested or unvested) expire after 7 years or 90 days
     after  termination  of  employment.

(2)  Based on 453,550  options  granted  during the fiscal year ended January 1,
     2005.

Aggregated  Option  Exercises  in Last  Fiscal Year and Fiscal  Year-End  Option
Values

     The  following  table  sets  forth the  number of  shares  covered  by both
exercisable and  unexercisable  stock options held by each of the Named Officers
at January 1, 2005. Quentin Wright and Michael Weber are not listed on the table
below  because  they did not join the Company in their  capacities  as executive
officers  until  after  January  1,  2005.  As  indicated  below,  two (2) Named
Officers,  John D. Heaton and Paul B. Nolan,  exercised stock options during the
fiscal year ended January 1, 2005.



                                                                 Number of Securities
                                                                      Underlying                 Value of Unexercised In-the-
                                                                 Unexercised Options at                Money Options at
                               Shares              Value           Fiscal Year-End (#)              Fiscal Year-End ($)(2)
                             Acquired on         Realized($)   -----------------------------     ----------------------------
Name                          Exercise(#)           (1)        Exercisable     Unexercisable     Exercisable    Unexercisable
--------------               -----------        ----------     -----------     -------------     -----------    -------------
                                                                                               
John D. Heaton                 100,000          $ 674,000        219,583          402,917        $ 2,243,722     $ 3,477,728
Vincent J. Coates                   --                 --             --               --                 --              --
Roger Ingalls, Jr.                  --                 --         15,750           20,750            164,115         192,865
Paul B. Nolan                   26,666            213,594         16,666           16,668              9,132         135,107


------------------------------
(1)  The  value  realized  upon  exercise  is (i) the fair  market  value of the
     Company's  common stock on the date of exercise,  less the option  exercise
     price per share,  multiplied  by (ii) the number of shares  underlying  the
     options exercised.
(2)  The  value  of  unexercised  options  is (i) the fair  market  value of the
     Company's  common stock on December  31, 2004 ($16.12 per share),  less the
     option  exercise  price of  in-the-money  options,  multiplied  by (ii) the
     number of shares underlying such options.

Employment  Contracts  and  Termination  of  Employment  and   Change-in-Control
Arrangements

     Pursuant  to the terms of an  agreement  between the Company and Vincent J.
Coates, the Chairman of the Board of the Company,  dated May 1, 1985, as amended
and restated in August 1996 and April 1998, the Company is obligated to continue
to pay Mr.  Coates his salary and  benefits  for five years from the date of his
resignation  in the event Mr.  Coates is  required  to resign as Chairman of the
Board under certain circumstances, including a change of control.


                                       14


     In April 1998,  the Company  entered into an agreement  with John D. Heaton
pursuant  to which  the  Company  agreed to pay Mr.  Heaton  his  annual  salary
(excluding  bonuses)  for a period of one year from the date that he is required
or  requested  for any reason not  involving  good cause,  including a change of
control,  to  involuntarily   relinquish  his  positions  with  the  Company  as
President,  Chief  Executive  Officer and  director.  If Mr.  Heaton  leaves the
Company voluntarily, or if he is asked to leave under certain circumstances,  no
such severance payment is required.

     In March 1995,  the Company  entered into an agreement  with Roger Ingalls,
Jr.  pursuant to which the Company  agreed to pay Mr.  Ingalls his annual salary
(excluding  bonuses) for a period of one hundred twenty (120) days from the date
he is terminated without cause.

Equity Compensation Plan Information

     All  of the  Company's  equity  compensation  plans  except  the  2002  Non
Statutory  Stock Option Plan were  approved by the Company's  shareholders.  The
following  table  sets  forth,   for  all  of  the  Company's   existing  equity
compensation  plans,  the number of outstanding  option grants and the number of
shares  remaining  available for issuance as of the fiscal year ended January 1,
2005.


                                                                                                             Number of
                                                                                                             Securities
                                                                         Number of                           Remaining
                                                                      Securities to be      Weighted       Available for
                                                                        Issued Upon         Average       Future Issuance
                                                                        Exercise of      Exercise Price     Under Equity
                                                                        Outstanding      of Outstanding     Compensation
                                                                          Options           Options          Plans (1)
                                                                      ---------------  ----------------   ---------------
                                                                                                      
Equity Compensation Plans Approved by Security Holders                   1,555,629       $    11.94            483,444
Equity Compensation Plans Not Approved by Security Holders               1,076,646       $     8.13             35,359

------------------------------
(1) Excludes securities to be issued upon exercise of outstanding options.

Certain Relationships

     Vincent  J.  Coates is the father of Norman V.  Coates.  There are no other
family  relationships  between any of the foregoing nominees or between any such
nominees and any of the executive officers of the Company.

Section 16(a) Beneficial Ownership Reporting Compliance

     Section 16(a) of the Exchange Act requires the Company's executive officers
and directors,  and persons who own more than ten percent of a registered  class
of the Company's equity securities,  to file reports of ownership and changes in
ownership with the Securities  and Exchange  Commission and the Nasdaq  National
Market. Executive officers,  directors and greater than ten percent shareholders
are required by Securities  and Exchange  Commission  regulations to furnish the
Company with copies of all Section  16(a) forms that they file.  Based solely on
its review of the copies of such forms received by it or written representations
from certain reporting persons, the Company believes that, with the exception of
Roger Ingalls,  Jr., during the fiscal year ended January 1, 2005, its executive
officers,  directors and greater than ten percent shareholders complied with all
applicable  filing  requirements.  Mr. Ingalls failed to timely report an option
grant on Form 4.


                                       15


Report of the Audit Committee of the Board of Directors

     The  following  is the  report  of the  audit  committee  of the  board  of
directors  describing its review of materials and determinations with respect to
its auditors and financial statements for the fiscal year ended January 1, 2005.
The  information  contained in this report shall not be deemed to be "soliciting
material" or to be "filed" with the  Securities  and  Exchange  Commission,  nor
shall such information be incorporated by reference into any future filing under
the  Securities  Act or  Exchange  Act,  except to the extent  that the  Company
specifically incorporates it by reference into such filing.

     In accordance  with its written  charter adopted by the board of directors,
the  audit   committee   assists  the  board  of  directors  in  fulfilling  its
responsibility  for  oversight of the quality and  integrity of the  accounting,
auditing and  financial  reporting  practices of the Company.  During the fiscal
year  ended  January  1,  2005,  the audit  committee  met (or acted by  written
consent) five (5) times, and the audit committee chairman,  as representative of
the  committee,   discussed  the  interim  financial  information  contained  in
quarterly   earnings   announcements   with  the  chief  financial  officer  and
independent auditors prior to public release.

     The audit  committee  received  from the Company's  independent  auditors a
formal written statement,  consistent with Independence Standards Board Standard
No. 1,  "Independence  Discussions with Audit  Committees,"  which describes all
relationships  between the  auditors  and the  Company  that,  in the  auditors'
professional  opinion,  might  reasonably  be thought  to bear on the  auditors'
independence.   The  audit   committee   discussed   with  the  auditors   these
relationships and satisfied itself as to the auditors' independence.

     The audit  committee  also  discussed  and  reviewed  with the  independent
auditors all communications  required by the Public Company Accounting Oversight
Board (the  "PCAOB")  standards,  including  those  described  in  Statement  on
Auditing  Standards No. 61, as amended,  "Communication  with Audit  Committees"
and, with and without management present,  discussed and reviewed the results of
the independent auditors' Audit of the Company's financial statements.

     Additionally,  the audit  committee  reviewed  and  discussed  the  audited
financial  statements of the Company as of and for the fiscal year ended January
1,  2005  with  management  and the  independent  auditors.  Management  has the
responsibility for the preparation of the Company's financial statements and the
independent auditors have the responsibility for the Audit of those statements.

     Based on the  foregoing  review and  discussions  with  management  and the
independent auditors,  the audit committee recommended to the board of directors
that the  Company's  audited  financial  statements as of and for the year ended
January 1, 2005 be  included  in its  Annual  Report on Form 10-K for the fiscal
year  ended  January  1,  2005 for  filing  with  the  Securities  and  Exchange
Commission.  The audit committee also  recommended the  appointment,  subject to
shareholder  approval,  of the  independent  auditors and the board of directors
concurred in such recommendation.

Members of the Audit Committee

J. Thomas Bentley, Chairman
Edmond R. Ward
William G. Oldham


                                       16


Report of the Compensation/Stock Option Committee of the Board of Directors

     The following is the report of the  compensation/stock  option committee of
the  board  of  directors  describing   compensation   policies  and  rationales
applicable to certain of its executive officers with respect to the compensation
paid to such  executive  officers for the fiscal year ended January 1, 2005. The
information  contained  in such  report  shall not be  deemed to be  "soliciting
material" or to be "filed" with the  Securities  and  Exchange  Commission,  nor
shall such information be incorporated by reference into any future filing under
the  Securities  Act or  Exchange  Act,  except to the extent  that the  Company
specifically incorporates it by reference into such filing.

     General. The compensation/stock  option committee is responsible for making
recommendations  to the board of  directors  with  respect to cash  compensation
levels for certain of the Company's executive officers. During fiscal year ended
January 1, 2005, the  compensation/stock  option  committee also was responsible
for determining levels of equity-based compensation for the Company's employees.

     Compensation  Philosophy.  The  compensation/stock  option  committee makes
recommendations  as to the  salaries  of certain of the  executive  officers  by
considering  (i) the  salaries of  executive  officers in similar  positions  at
comparably-sized  peer companies,  (ii) the Company's financial performance over
the  past  year  based  upon  revenues  and  operating  results  and  (iii)  the
achievement of individual  performance goals related to each executive officer's
duties and areas of  responsibility.  The  compensation/stock  option  committee
makes recommendations as to the levels of cash bonuses awarded to certain of the
Company's executive officers and views such bonuses as being an integral part of
its  performance  based  compensation  program.  Such  bonuses  are based on the
Company's profits and are determined as a percentage of the officer's salaries.

     Equity-Based  Compensation.  The compensation/stock  option committee views
stock  options  as  an  important  part  of  its  long-term,   performance-based
compensation  program.  The  compensation/stock  option  committee  grants stock
options to all  employees  of the Company  under its 2000 Stock  Option Plan and
2002  Nonstatutory  Stock Option Plan based upon the  committee's  estimation of
each employee's  contribution to the long-term  growth and  profitability of the
Company. The 2000 Stock Option Plan is intended to provide additional incentives
to the executive  officers to maximize  shareholder  value.  Options are granted
under the 2000 Stock Option Plan and the 2002 Nonstatutory  Stock Option Plan at
the then-current  market price and are generally  subject to three-year  vesting
periods to encourage key employees to remain with the Company.

     Compensation of the Chief Executive Officer. The compensation/stock  option
committee  has  reviewed  all  components  of  the  chief  executive   officer's
compensation,   including  salary,   bonus,   equity,  stock  options,  and  the
obligations under the Company's change of control  severance  agreement with Mr.
Heaton.

     Based on this review,  the  compensation/stock  option  committee found Mr.
Heaton's total compensation (and, in the case of the change of control severance
agreement,  potential  payout)  in  the  aggregate  to  be  reasonable  and  not
excessive.  Furthermore,  although Mr. Heaton made valuable contributions to the
Company  during  fiscal  year  ended  January  3,  2004,  in light  of  economic
conditions,  the compensation/stock option committee determined that an increase
to the base salary of the chief executive  officer would not be appropriate.  It
should be noted that when the compensation/stock  option committee considers any
component of the chief  executive  officer's total  compensation,  the aggregate
amounts  and mix of all the  components,  including  accumulated  (realized  and
unrealized) option gains are taken into consideration in the  compensation/stock
option committee's decisions.

     Section 162(m). The Company intends that awards granted under the Company's
2000 Stock Option Plan and 2002 Nonstatutory  Stock Option Plan be deductible by
the Company  under  Section  162(m) of the  Internal  Revenue  Code of 1986,  as
amended.

Members of the Compensation/Stock Option Committee

Edmond Ward, Chairman
J. Thomas Bentley
Stephen J Smith


                                       17


Stock Performance Graph

     The following graph compares the cumulative total return to shareholders of
the Company's  common stock from December 31, 1999 through  December 31, 2004 to
the  cumulative  total  return over such period of (i) the Nasdaq  Stock  Market
(U.S.) Index and (ii) the RDG  Technology  Composite  Index.  The results  shown
assume that $100 was invested on December 31, 1999 in the Company's common stock
and in each of the other two indices with any dividends reinvested.  Information
about RDG Technology Composite Index may be obtained at the Research Data Group,
Inc. website address  www.researchdatagroup.com/ComponentsTech.htm or by calling
Research Data Group at (415) 643-6000.

     The information  contained in the performance  graph shall not be deemed to
be  "soliciting  material"  or to be "filed"  with the  Securities  and Exchange
Commission,  nor shall such  information be  incorporated  by reference into any
future filing under the  Securities  Act or Exchange  Act,  except to the extent
that the Company specifically incorporates it by reference into such filing.

     COMPARISON   OF  5-YEAR   CUMULATIVE   TOTAL   RETURN   AMONG   NANOMETRICS
INCORPORATED,  THE  NASDAQ  STOCK  MARKET  (U.S.)  INDEX AND THE RDG  TECHNOLOGY
COMPOSITE INDEX

                       [GRAPHIC OMITTED][GRAPHIC OMITTED]
                               (Performance Graph)


                                       18


"Householding" of Proxy Materials

     The  Securities  and  Exchange  Commission  has  adopted  rules that permit
companies and  intermediaries  such as brokers to satisfy delivery  requirements
for proxy statements with respect to two or more  shareholders  sharing the same
address by delivering a single proxy statement  addressed to those shareholders.
This  process,  which is  commonly  referred to as  "householding,"  potentially
provides extra convenience for shareholders and cost savings for companies.  The
Company and some brokers  household proxy  materials,  delivering a single proxy
statement  to  multiple   shareholders   sharing  an  address  unless   contrary
instructions  have been received from the affected  shareholders.  Once you have
received  notice from your broker or the Company  that the broker or the Company
will be householding materials to your address, householding will continue until
you are  notified  otherwise or until you revoke your  consent.  Upon written or
oral request to the Investor  Relations  department  of the Company,  by mail at
1550  Buckeye  Drive,  Milpitas,  California,  95035  or by  telephone  at (408)
435-9600,  the Company will promptly  deliver a copy of its proxy statement to a
shareholder if that  shareholder  shares an address with another  shareholder to
which a single copy of the proxy  statement was  delivered.  A  shareholder  may
notify the Company as  described  above if the  shareholder  wishes to receive a
separate  copy of the proxy  statement in the future or,  alternatively,  if the
shareholder wishes to receive a single copy of the materials instead of multiple
copies.


                                       19


                                   PROPOSAL 2
                  REINCORPORATION FROM CALIFORNIA INTO DELAWARE
                          (THE REINCORPORATION MERGER)

General

     The board of  directors,  by a unanimous  vote at a special  meeting of the
board of directors,  adopted a resolution approving a change in the state of its
incorporation from California to Delaware.  If approved by the requisite vote of
the Company's  shareholders,  this  reincorporation  shall be effected through a
merger of the Company with its wholly  owned  subsidiary,  Minor  League  Merger
Corporation, a Delaware corporation.

Proposal

     The  Company  is  proposing  to merge  with and into  Minor  League  Merger
Corporation.  This merger is referred to herein as the  reincorporation  merger.
Minor League Merger  Corporation will succeed to all of the rights,  properties,
assets and liabilities of the Company.  Upon  completion of the  reincorporation
merger, the Company will cease to exist and Minor League Merger Corporation will
continue to operate the  business  of the  Company  under the name  "Nanometrics
Incorporated"  as  a  Delaware   corporation.   For   convenience,   Nanometrics
Incorporated,  after the reincorporation merger, is sometimes referred to as the
Delaware  company.  Each outstanding share of the Company's common stock, no par
value per share, will be automatically  converted into one share of common stock
of the Delaware company,  $0.001 par value per share, upon the effective date of
the  reincorporation  merger.  It will not be necessary for  shareholders of the
Company to exchange their existing stock  certificates for stock certificates of
the  Delaware   company.   Upon  completion  of  the   reincorporation   merger,
certificates which immediately prior to the  reincorporation  merger represented
shares  of  common  stock of the  Company  will be deemed  for all  purposes  to
represent  the same number of shares of the  Delaware  company's  common  stock.
Nevertheless,  shareholders  may exchange their  certificates if they so choose.
The Company's  common stock is listed for trading on the Nasdaq  National Market
and, after the reincorporation  merger, the Delaware company's common stock will
continue to be traded on the Nasdaq National Market without interruption,  under
the same symbol, NANO, as the shares of the Company's common stock are currently
traded.

     The  reincorporation  merger has been  approved by the  Company's  board of
directors,  by a  unanimous  vote  at a  special  meeting.  If  approved  by the
requisite  vote  of the  Company's  shareholders,  it is  anticipated  that  the
reincorporation  merger will become  effective as soon as practicable  following
the annual  meeting of  shareholders.  The Company's  shareholders  will have no
appraisal rights with respect to the reincorporation merger.

     Immediately  following the completion of the  reincorporation  merger,  the
composition of the board of directors of Minor League Merger Corporation will be
the same as the composition of the board of directors of the Company immediately
prior to the reincorporation merger.

     After the reincorporation  merger, the rights of the Company's stockholders
and the  Company's  corporate  affairs will be governed by the Delaware  General
Corporation Law, and the certificate of incorporation and bylaws of the Delaware
company,  or the  Delaware  charter  documents,  rather  than by the  California
General Corporation Law, and the current articles of incorporation and bylaws of
the Company, or the California charter documents.

     The summary and discussion of the proposed reincorporation merger set forth
in this proxy  statement  is  qualified  in its  entirety  by  reference  to the
California  General  Corporation Law, the Delaware General  Corporation Law, the
California charter documents and the Delaware charter  documents.  Copies of the
California  charter  documents and the Delaware charter  documents are available
for inspection at the Company's  executive  offices.  Additionally,  the Company
will send such documents to you upon request.  We urge you to read each of these
documents carefully for a complete understanding of your rights.

Principal Reasons for the Reincorporation Merger

     As the Company plans for the future,  the board of directors and management
believe that it is essential to be able to draw upon well-established principles
of corporate  governance in making legal and business decisions.  The prominence
and  predictability of Delaware  corporate law provide a reliable  foundation on
which the Company's


                                       20


corporate  governance  decisions can be based, and the Company believes that its
shareholders will benefit from the  responsiveness of Delaware  corporate law to
their needs and to those of the corporation they own.

Prominence, Predictability and Flexibility of Delaware Law

     For many years, Delaware has followed a policy of encouraging incorporation
in that state and, in furtherance of that policy, has been a leader in adopting,
construing and implementing comprehensive, flexible corporate laws responsive to
the legal and business  needs of  corporations  organized  under its laws.  Many
corporations have chosen Delaware  initially as a state of incorporation or have
subsequently changed their corporate domicile to Delaware. Because of Delaware's
prominence as the state of incorporation for many major  corporations,  both the
legislature  and  courts  in  Delaware  have   demonstrated  an  ability  and  a
willingness to act quickly and effectively to meet changing  business needs. The
Delaware courts have developed  considerable expertise in dealing with corporate
issues,  and a substantial  body of case law has developed  construing  Delaware
law,  resulting  in  greater  predictability  with  respect to  corporate  legal
affairs.

Increased Ability to Attract and Retain Qualified Directors

     Both  California  and  Delaware  law  permit a  corporation  to  include  a
provision  in its charter  which  reduces or limits the  monetary  liability  of
directors  for  breaches  of  fiduciary  duty  in  certain  circumstances.   The
increasing  frequency of claims and litigation  directed  against  directors and
officers has expanded the risks facing directors and officers of corporations in
exercising  their  respective  duties.  The amount of time and money required to
respond to such claims and to defend such  litigation  can be  substantial.  The
Company desires to reduce these risks to its directors and officers and to limit
situations in which monetary  damages can be recovered  against its directors so
that it may continue to attract and retain  qualified  directors  who  otherwise
might be unwilling to serve because of the risks involved.  The Company believes
that, in general,  Delaware law provides  greater  protection to directors  than
California law and that Delaware law regarding a corporation's  ability to limit
director  liability is more developed and provides more guidance than California
law.

Well Established Principles of Corporate Governance

     There is substantial  judicial  precedent in the Delaware  courts as to the
legal  principles  applicable to measures that may be taken by a corporation and
as to the conduct of the board of directors,  such as the business judgment rule
and other standards.  This tends to assure a significant measure of certainty to
legal  aspects  of the  conduct  of  business  and a sound  basis for  planning.
Therefore,  the Company  believes  that its  shareholders  will benefit from the
well-established principles of corporate governance that Delaware law affords.

No Change in Board  Members,  Business,  Management,  Employee  Benefit Plans or
Location of Principal Facilities

     The  reincorporation  merger will effect a change in the legal  domicile of
the Company and certain  other  changes of a legal nature which are described in
this  proxy   statement.   Except  as   contemplated   in  connection  with  the
reincorporation merger, the reincorporation merger will NOT result in any change
in the Company's business,  management, assets or liabilities or the location of
its principal  facilities.  Under United States  generally  accepted  accounting
principles,  the proposed reincorporation will not result in any gain or loss to
the Company. The consolidated  financial statements and results of operations of
the Delaware company immediately  following the  reincorporation  merger will be
identical  to that  of the  Company  immediately  prior  to the  reincorporation
merger.  The directors of the Company  immediately prior to the  reincorporation
merger will become the directors of the Delaware company  immediately  following
the  reincorporation  merger.  All employee  benefit,  stock option and employee
stock  purchase  plans of the  Company  will be  assumed  and  continued  by the
Delaware  company,  and each option or right issued  pursuant to such plans will
automatically  be converted  into an option or right to purchase the same number
of shares  common  stock of the Delaware  company,  at the same price per share,
upon the same terms,  and subject to the same  conditions.  Shareholders  should
note that  approval  of this  proposal 2 will also  constitute  approval  of the
assumption  of these  plans by the  Delaware  company.  Other  employee  benefit
arrangements of the Company will also be continued by the Delaware  company upon
the terms and subject to the  conditions  currently  in effect.  As noted above,
after the  reincorporation  merger,  the shares of common  stock of the Delaware
company will continue to be traded, without interruption,  in the same principal
market (the Nasdaq  National  Market) and under the same  symbol,  NANO,  as the
shares of common stock of the Company are currently traded. The Company believes
that the proposed  reincorporation will not affect any of its material contracts
with any third parties and that the Company's rights and obligations  under such
material  contractual  arrangements will continue and be assumed by the Delaware
company.


                                       21


Material United States Federal Income Tax  Consequences  of the  Reincorporation
Merger

     This section of the proxy  statement  summarizes the material United States
federal income tax considerations of the reincorporation merger to the Company's
shareholders.  The summary is based on the  Internal  Revenue  Code of 1986,  as
amended,  applicable  United  States  Treasury  regulations  under the  Internal
Revenue Code,  administrative rulings and judicial authority, all as of the date
of this proxy statement. All of the foregoing authorities are subject to change,
with or without  retroactive  effect, and any change could affect the continuing
validity  of this  summary.  A  ruling  from the  Internal  Revenue  Service  in
connection with the reincorporation merger will not be requested,  and we cannot
assure  you  that  the  Internal   Revenue   Service  will   conclude  that  the
reorganization  merger qualifies as a reorganization under Section 368(a) of the
Internal Revenue Code.

     The summary  assumes that the Company's  shareholders  hold their shares as
capital assets.  The summary does not address the tax  consequences  that may be
applicable to particular shareholders in light of their individual circumstances
or to  shareholders  who are  subject to special tax rules,  such as  non-United
States  persons,  dealers in  securities,  shareholders  who acquired  shares of
common stock  through the exercise of options or  otherwise as  compensation  or
through a qualified  retirement  plan,  and  shareholders  who hold their common
stock as part of a straddle, hedge, or conversion transaction. In addition, this
summary does not address the tax consequences of the  reincorporation  merger to
holders  of  options  or  warrants  to  acquire  capital  stock  of or  the  tax
consequences of transactions effectuated prior or subsequent to, or concurrently
with,  the  reincorporation  merger,  whether or not any such  transactions  are
undertaken in connection with the reincorporation merger. This summary also does
not address any consequences  arising under the tax laws of any state, local, or
foreign jurisdiction.

         The reincorporation merger will qualify as a reorganization within the
meaning of Section 368(a) of the Internal Revenue Code, which will result in the
following federal income tax consequences to the Company's shareholders:

     o    shareholders  will not  recognize any gain or loss upon the receipt of
          common stock in the reincorporation merger;

     o    the aggregate tax basis of the common stock  received by  shareholders
          in the  reincorporation  merger will be the same as the  aggregate tax
          basis of the common stock surrendered in exchange therefor;

     o    the holding period of the common stock received by each shareholder in
          the  reincorporation  merger will  include the period for which common
          stock surrendered in exchange therefor was considered to be held; and

     o    the Company will not recognize  gain or loss solely as a result of the
          reincorporation merger.

     SHAREHOLDERS  SHOULD  CONSULT  THEIR OWN TAX  ADVISORS  WITH RESPECT TO THE
SPECIFIC TAX CONSEQUENCES OF THE PROPOSED REINCORPORATION TO THEM, INCLUDING THE
APPLICATION AND EFFECT OF UNITED STATES FEDERAL, STATE, LOCAL AND FOREIGN INCOME
AND OTHER TAX LAWS.

Vote Required

     The affirmative vote of the holders of a majority of the outstanding shares
of common  stock  entitled to vote on the record date is required to approve its
reincorporation from a California corporation to a Delaware corporation.  Unless
otherwise instructed, the proxies will vote "FOR" this proposal 2.

     THE BOARD OF DIRECTORS RECOMMENDS THAT THE SHAREHOLDERS VOTE "FOR" PROPOSAL
2.


                                       22


                                   PROPOSAL 3
                                 APPROVAL OF THE
                           2005 EQUITY INCENTIVE PLAN

     We are asking  stockholders  to approve the Company's  adoption of the 2005
Equity  Incentive  Plan  (the  "2005  Plan") so that we can use the 2005 Plan to
achieve the Company's  goals and also receive a federal income tax deduction for
certain  compensation  paid under the 2005 Plan.  The board of directors and the
Company's  compensation  committee  have  approved  the 2005  Plan,  subject  to
stockholder  approval at the annual meeting.  Our named  executive  officers and
directors have an interest in this proposal by virtue of their being eligible to
receive  equity  awards  under the 2005 Plan.  The full text of the 2005 Plan is
attached hereto as Appendix A.

     A total of 1,200,000  shares of common stock have  initially  been reserved
for  issuance  under the 2005 Plan,  plus an annual  increase to be added on the
first day of the  Company's  fiscal year for three years  (beginning in 2006 and
ending after the 2008  increase),  equal to the least of (i) 3% of the Company's
outstanding common stock on that date or (ii) an amount determined  by the board
of directors.

     We strongly  believe that the approval of the 2005 Plan is essential to our
continued  success.  The board of directors and  management  believe that equity
awards motivate high levels of performance, align the interests of employees and
stockholders  by giving  employees  the  perspective  of an owner with an equity
stake in the Company,  and provide an effective  means of  recognizing  employee
contributions  to the  success  of the  Company.  The  board  of  directors  and
management  believe  that  equity  awards are of great value in  recruiting  and
retaining  personnel  who help the Company meet its goals,  as well as rewarding
and encouraging current employees. The board of directors and management believe
that the ability to grant equity awards will be important to the future  success
of the Company.

     The  Company's  2000 Stock  Option Plan had only 518,803  shares  remaining
available for issuance as of January 1, 2005. As a result,  if the  stockholders
do not approve this proposal, the Company will be limited in its ability to make
discretionary option or other equity award grants under an equity incentive plan
to assist in recruiting and retaining personnel.

     Summary of the Plan

     The following paragraphs provide a summary of the principal features of the
2005 Plan and its operation. The Plan is set forth in its entirety as Appendix A
to this proxy statement.  The following  summary is qualified in its entirety by
reference to the 2005 Plan.

     Background and Purpose of the 2005 Plan

     The 2005  Plan  permits  the  grant of stock  options,  stock  appreciation
rights,  restricted stock,  restricted stock units and performance  shares (each
individually,  an "Award").  The 2005 Plan is intended to attract and retain the
best available personnel for positions of substantial responsibility,  including
(1) employees of the Company and any parent or subsidiary,  (2)  consultants who
provide services to the Company and any parent or subsidiary,  and (3) directors
of the Company.  The 2005 Plan also is designed to provide additional  incentive
to these services  providers,  to promote the success of the Company's  business
and to permit the payment of  compensation  that qualifies as  performance-based
compensation  under  Section  162(m) of the Internal  Revenue  Code of 1986,  as
amended ("Section 162(m)").

     Administration of the 2005 Plan

     A committee (the "Committee") of the board of directors will administer the
2005  Plan.  The  Committee  generally  will  be the  compensation/stock  option
committee,  which  will  consist  of  two  or  more  directors  who  qualify  as
"non-employee  directors"  under Rule 16b-3 of the  Securities  Exchange  Act of
1934,  and as "outside  directors"  under Section 162(m) (so that the Company is
entitled to a federal tax deduction for certain compensation paid under the 2005
Plan).  Notwithstanding the foregoing,  the Board may itself administer the 2005
Plan or appoint one or more  committees to administer the 2005 Plan with respect
to different groups of service providers.  The Board, the compensation committee
or other  committee  administering  the 2005 Plan is  referred  to herein as the
"Administrator."

     Subject  to the  terms of the 2005  Plan,  the  Administrator  has the sole
discretion to select the employees,  consultants, and directors who will receive
Awards,  determine the terms and conditions of Awards (for example, the

                                       23



exercise price and vesting  schedule),  and interpret the provisions of the 2005
Plan and outstanding Awards. The Administrator may not, however,  reprice Awards
or exchange Awards for other Awards, cash or a combination thereof,  without the
approval of the stockholders.

     If  an  Award  is  settled  is  cancelled,  expires,  or  is  forfeited  or
repurchased by the Company for any reason without having been fully exercised or
vested,  the unvested,  cancelled,  forfeited or repurchased number of shares of
Company common stock ("Shares") generally will be returned to the available pool
of Shares  reserved  for  issuance  under the 2005 Plan.  Any Shares  subject to
options or stock  appreciation  rights  generally  will be counted  against  the
available  pool as one Share  for every  Share  subject  to the  option or stock
appreciation  rights.  Any  Shares  of  restricted  stock or Shares  subject  to
performance  shares or restricted  stock units with a per share or unit purchase
price lower than 100% of Fair Market Value on the date of grant  generally  will
be counted  against the available pool as two Shares for every one Share subject
thereto.  Shares  actually  issued  under the 2005 Plan or  withheld  to pay the
exercise  price of an Award  or to  satisfy  tax  withholding  obligations  with
respect  to an Award  will  not be  returned  to the  2005  Plan and will not be
available for future issuance under the plan.  Also, if the Company  experiences
any dividend or other distribution  (whether in the form of cash, Shares,  other
securities,  or other property),  recapitalization,  stock split,  reverse stock
split, reorganization,  merger, consolidation,  split-up, spin-off, combination,
repurchase,  or exchange of Shares or other securities of the Company,  or other
change in the  corporate  structure  of the  Company  affecting  the  Shares,  a
proportional  adjustment  will be made to the  number  of Shares  available  for
issuance  under  the 2005  Plan,  the  number  and price of  Shares  subject  to
outstanding  Awards and the  per-person  limits on  Awards,  as  appropriate  to
reflect the stock dividend or other change,  should the Administrator  determine
that  such an  adjustment  is  appropriate  in  order  to  prevent  dilution  or
enlargement of the benefits or potential  benefits intended to be made available
under the 2005 Plan.

     Eligibility to Receive Awards

     The  Administrator  selects the employees,  consultants,  and directors who
will be granted Awards under the 2005 Plan. The actual number of individuals who
will receive  Awards cannot be determined in advance  because the  Administrator
has the discretion to select the participants.

     Stock Options

     A stock option is the right to acquire Shares at a fixed exercise price for
a fixed  period  of time.  Under  the 2005  Plan,  the  Administrator  may grant
nonstatutory  stock  options  and/or  incentive  stock  options  (which  entitle
employees,  but  not  the  Company,  to  more  favorable  tax  treatment).   The
Administrator  will determine the number of Shares  covered by each option,  but
during any fiscal year of the Company, no participant may be granted options and
stock appreciation rights together covering more than 500,000 Shares.

     The  exercise  price of the  Shares  subject  to each  option is set by the
Administrator but cannot be less than 100% of the fair market value (on the date
of grant) of the Shares covered by the option.  In addition,  the exercise price
of an  incentive  stock option must be at least 110% of fair market value if (on
the grant date) the participant owns stock possessing more than 10% of the total
combined  voting  power of all  classes  of stock of the  Company  or any of its
subsidiaries.  The aggregate fair market value of the Shares  (determined on the
grant date) covered by incentive stock options which first become exercisable by
any participant during any calendar year also may not exceed $100,000.

     Options  issued under the 2005 Plan become  exercisable at the times and on
the terms established by the  Administrator.  The Administrator also establishes
the time at which  options  expire,  but the  expiration  of an incentive  stock
option  may not be later  than ten years  after the grant  date (such term to be
limited  to 5 years  in the  case of an  incentive  stock  option  granted  to a
participant who owns stock possessing more than 10% of the total combined voting
power of all classes of stock of the Company or any of parent or  subsidiary  of
the Company).

     The  exercise  price  of each  option  must be paid in full at the  time of
exercise.  The  exercise  price  may be paid in any  form as  determined  by the
Administrator,  including,  but not limited to, cash, check, surrender of Shares
that have a fair market  value on the date of surrender  equal to the  aggregate
exercise  price  of the  shares  as to  which  the  option  is  being  exercise,
consideration received pursuant to a cashless exercise program, promissory note,
through a reduction in the amount of Company  liability to the  participant,  or
other legal methods of consideration.


                                       24


     If a participant's  service  relationship with us terminates for any reason
(excluding  death or  disability),  then the participant may exercise the option
within a period of time as determined by the  Administrator and specified in the
Award  agreement  to the  extent  that  the  Award  is  vested  on the  date  of
termination  (but in no  event  later  than the  expiration  of the term of such
Award). In the absence of a specified time set forth in the Award agreement, the
option will remain exercisable for three months following the termination of the
participant's  service  relationship.  If a participant's  service  relationship
terminates due to the participant's disability or death, the participant (or his
or her estate or beneficiary) may exercise the option within a period of time as
determined  by the  Administrator  and  specified in the Award  agreement to the
extent  the  Award  was  vested  on the  date  of  termination  of  the  service
relationship  (but in no event  later  than the  expiration  of the term of such
Award).  In the absence of a specified time in the Award  agreement,  the option
will remain  exercisable for the twelve months  following the termination of the
participant's service due to disability or death.

     Stock Appreciation Rights

     Stock  appreciation  rights are Awards that grant the participant the right
to receive an amount equal to (1) the number of Shares exercised,  times (2) the
amount by which the  Company's  stock price  exceeds  the  exercise  price.  The
Administrator  set the exercise price. An individual will be able to profit from
a stock  appreciation right only if the fair market value of the stock increases
above the exercise price. The Company's  obligation arising upon the exercise of
a stock  appreciation right may be paid in Shares or in cash, or any combination
thereof, as the Administrator may determine.

     Awards of stock  appreciation  rights may be granted in connection with all
or any  part  of an  option  or may be  granted  independently  of  options.  No
participant  may be  granted  stock  appreciation  rights and  options  together
covering more than 500,000 shares in any fiscal year of the Company.

     The  Administrator  determines the terms of stock  appreciation  rights.  A
stock appreciation right will be exercisable,  in whole or in part, at such time
as the  Administrator  will specify in the Award  agreement,  but will expire no
later than ten (10) years after the date of grant.

     If a participant's  service  relationship with us terminates for any reason
(excluding  death or  disability),  then the  participant may exercise the stock
appreciation  right within a period of time as determined  by the  Administrator
and  specified in the Award  agreement to the extent that the Award is vested on
the date of  termination  (but in no event later than the expiration of the term
of such  Award).  In the  absence  of a  specified  time set  forth in the Award
agreement, the stock appreciation right will remain exercisable for three months
following  the  termination  of the  participant's  service  relationship.  If a
participant's   service   relationship   terminates  due  to  the  participant's
disability or death,  the participant (or his or her estate or beneficiary)  may
exercise the stock  appreciation  right within a period of time as determined by
the  Administrator  and specified in the Award agreement to the extent the Award
was vested on the date of  termination  of the service  relationship  (but in no
event later than the expiration of the term of such Award).  In the absence of a
specified time in the Award agreement,  the stock appreciation right will remain
exercisable for the twelve months following the termination of the participant's
service due to disability or death.

     Restricted Stock

     Awards of  restricted  stock are Shares  that vest in  accordance  with the
terms and conditions established by the Administrator. The Administrator may set
vesting  criteria  based upon the  achievement  of  Company-wide,  departmental,
business unit or individual  goals,  which may include  continued  employment or
service, applicable federal or state securities or any other basis determined by
the  Committee.   If  the  Administrator  desires  that  the  Award  qualify  as
performance-based  compensation  under Section 162(m),  any restrictions will be
based on a specified list of performance  goals (see  "Performance  Goals" below
for more information).  The Administrator will determine the number of Shares of
restricted stock granted to any employee, consultant or director, but during any
fiscal year of the  Company,  no  participant  may be granted  more than 250,000
Shares in the aggregate of restricted  stock,  performance  shares or restricted
stock units.


                                       25


     Unless the Administrator  determines otherwise,  Shares of restricted stock
will be held by the Company as escrow agent until any restrictions on the Shares
have lapsed.  The Administrator may accelerate the time at which any restriction
may lapse or be removed.

     On the date set forth in the Award agreement, all unvested restricted stock
will be forfeited to the Company.

     Restricted Stock Units

     Awards of restricted  stock units are Shares that vest in  accordance  with
terms  and  conditions  established  by  the  Administrator.  The  Administrator
determines  the  number of  restricted  stock  units  granted  to any  employee,
consultant  or  director,  but  during  any  fiscal  year  of  the  Company,  no
participant may be granted  more than 250,000 Shares in the aggregate subject to
restricted stock units, performance shares or restricted stock.

     In determining  whether an Award of restricted  stock units should be made,
and/or the vesting  schedule for any such Award,  the  Administrator  may impose
whatever  conditions to vesting it determines to be  appropriate.  The number of
restricted  stock units paid out to the participant will depending on the extent
to which  the  vesting  criteria  are met.  The  Administrator  may set  vesting
criteria based upon the achievement of Company-wide, departmental, business unit
or  individual  goals,  which  may  include  continued  employment  or  service,
applicable  federal or state  securities  or any other basis  determined  by the
Committee.  Notwithstanding the foregoing, if the Administrator desires that the
Award  qualify as  performance-based  compensation  under  Section  162(m),  any
restrictions  will be  based  on a  specified  list of  performance  goals  (see
"Performance Goals" below for more information).

     Upon satisfying the applicable  vesting criteria,  the participant shall be
entitled to the payout  specified in the Award  agreement.  Notwithstanding  the
foregoing,  at  any  time  after  the  grant  of  restricted  stock  units,  the
Administrator  may  reduce or waive  any  vesting  criteria  that must be met to
receive a payout.  The  Administrator,  in its sole  discretion,  may pay earned
restricted  stock  units in  cash,  Shares,  or a  combination  thereof.  Shares
represented by restricted  stock units that are fully paid in cash will again be
available  for  grant  under  the  Plan.  On the  date set  forth  in the  Award
agreement, all unearned restricted stock units will be forfeited to the Company.

     Performance Shares

     Performance  shares  are  Awards  that  will  result  in  a  payment  to  a
participant only if performance  objectives established by the Administrator are
achieved  or the  Awards  otherwise  vest.  The  Administrator  may set  vesting
criteria based upon the achievement of Company-wide, departmental, business unit
or  individual  goals,  which  may  include  continued  employment  or  service,
applicable  federal or state  securities  or any other basis  determined  by the
Committee.  Notwithstanding the foregoing, if the Administrator desires that the
Award  qualify as  performance-based  compensation  under  Section  162(m),  any
restrictions  will be  based  on a  specified  list of  performance  goals  (see
"Performance Goals" below for more information).

     Performance  shares have an initial value equal to the fair market value of
a share on the date of grant.  Performance  shares may be granted to  employees,
consultants or directors at any time as shall be determined by the Administrator
in its sole discretion. Subject to the terms of the 2005 Plan, the Administrator
will have complete  discretion  to determine  the number of shares  subject to a
performance  share  award  and the  conditions  that  must be  satisfied,  which
typically  will be based  principally  or solely on  achievement  of performance
milestones but may include a service based component,  upon which is conditioned
on the grant or vesting of performance shares. Subject to the terms of the Plan,
the Administrator  will determined the number of performance shares granted to a
service provider,  during any fiscal year of the Company,  no participant may be
granted more than 250,000 Shares in the aggregate subject to performance shares,
restricted stock units, or restricted stock.

     On the date set forth in the Award  agreement,  all  unearned  or  unvested
performance shares will be forfeited to the Company


                                       26


     Performance Goals

     Under Section 162(m) of the Code, the annual compensation paid to our Chief
Executive  Officer  and to  each  of our  other  four  most  highly  compensated
executive  officers may not be  deductible  to the extent it exceeds $1 million.
However,  we are able to preserve the deductibility of compensation in excess of
$1 million if the conditions of Section 162(m) are met. These conditions include
stockholder  approval of the 2005 Plan,  setting  limits on the number of awards
that any individual may receive and for awards other than options,  establishing
performance  criteria that must be met before the award actually will vest or be
paid.

     We have  designed the Plan so that it permits us to pay  compensation  that
qualifies as performance-based under Section 162(m). Thus, the Administrator (in
its  discretion) may make  performance  goals  applicable to a participant  with
respect  to an  award.  At the  Administrator's  discretion,  one or more of the
following  performance  goals may apply (all of which are  defined in the Plan):
annual  revenue,  cash  position,  earnings  per share,  net income,  individual
performance  objectives,  marketing and sales expenses as a percentage of sales,
net income as a percentage of sales, net income,  operating cash flow, operating
income,  return  on  assets,  return  on  equity,  return  on  sales,  and total
stockholder  return.  The  Performance  Goals may  differ  from  Participant  to
Participant and from Award to Award.

     Any criteria used may be measured, as applicable (1) in absolute terms, (2)
in relative terms (including, but not limited to, passage of time and/or against
another  company or  companies),  (3) on a  per-share  basis,  (4)  against  the
performance of the Company as a whole or a business unit of the Company,  and/or
(5) on a pre-tax or  after-tax  basis.  The  Administrator  also will adjust any
evaluation  of  performance   under  a  performance  goal  to  exclude  (i)  any
extraordinary  non-recurring  items,  or  (ii)  the  effect  of any  changes  in
accounting  principles  affecting  the Company's or a business  units'  reported
results.

     Merger or Change in Control

     In the event of a merger "change in control" of the Company,  the successor
corporation   will  either  assume  or  provide  a  substitute  award  for  each
outstanding Award. In the event the successor  corporation  refuses to assume or
provide  a  substitute  award,  the  Award  will  immediately  vest  and  become
exercisable  as to all of the Shares  subject to such Award,  or, if applicable,
the Award will be deemed  fully  earned and will be paid out prior to the merger
or change in control.  In addition,  if an option,  stock  appreciation right or
right to purchase  restricted  stock has become fully vested and  exercisable in
lieu of assumption or substitution, the Committee will provide at least 15 days'
notice that the option, stock appreciation right or right to purchase restricted
stock  will  immediately  vest and  become  exercisable  as to all of the Shares
subject to such Award and all outstanding options, stock appreciation rights and
rights to purchase  restricted  stock will terminate upon the expiration of such
notice period.

     Awards to be Granted to Certain Individuals and Groups

     The number of Awards (if any) that an employee, consultant, or director may
receive  under  the 2005  Plan is in the  discretion  of the  Administrator  and
therefore cannot be determined in advance.  Our executive officers and directors
have an interest in this  proposal  because they are eligible to receive  Awards
under the 2005 Plan. To date,  stock  options have been granted  under  existing
Company equity plans.  The following  table sets forth for each of the Company's
executive  officers  and  directors  (a) the total  number of Shares  subject to
options  granted  during  the last  fiscal  year and (b) the  average  per Share
exercise price of such options.  Quentin Wright and Michael Weber are not listed
on the table below because they did not join the Company in their  capacities as
executive officers until after January 1, 2005.

                                            Number of          Average Per Share
         Name of Individual or Group     Options Granted        Exercise Price
         --------------------------      ---------------        ---------------
         Vincent J. Coates                          --               $
         John D. Heaton                        100,000               $12.02
         Edmond R. Ward                             --               $
         William G. Oldham                          --               $
         Paul B. Nolan                              --               $
         Roger Ingalls, Jr.                      5,000               $10.37
         Stephen J Smith, Jr.                   10,000               $16.71
         J. Thomas Bentley                      10,000               $16.71
         Norman V. Coates                       10,000               $11.39
         All executive officers,               105,000               $11.94
         as a group (4 persons)
         All directors who are not              30,000               $14.94
         executive officers, as a
         group (5 persons)
         All employees who are not             308,550               $12.64
         executive officers, as a group


                                       27


     Limited Transferability of Awards

     Awards granted under the 2005 Plan generally may not be sold,  transferred,
pledged, assigned, or otherwise alienated or hypothecated, other than by will or
by the applicable laws of descent and  distribution  and may be exercised during
the lifetime of the participant,  only by the participant.  Notwithstanding  the
foregoing,  the Administrator may permit an individual to transfer an Award. Any
transfer  shall  be  made  in  accordance  with  procedures  established  by the
Administrator.

Federal Tax Aspects

     The following  paragraphs  are a summary of the general  federal income tax
consequences to U.S.  taxpayers and the Company of Awards granted under the 2005
Plan. Tax consequences for any particular individual may be different.

     Nonstatutory stock options

     No taxable income is recognized when a nonqualified stock option is granted
to a participant.  Upon exercise, the participant will recognize ordinary income
in an amount  equal to the excess of the fair market  value of the Shares on the
exercise date over the exercise  price.  Any additional  gain or loss recognized
upon later disposition of the Shares is capital gain or loss.

     Incentive Stock Options

     No taxable income is recognized  when an incentive  stock option is granted
or exercised (except for purposes of the alternative  minimum tax, in which case
taxation is the same as for  nonstatutory  stock  options).  If the  participant
exercises  the option and then later sells or  otherwise  disposes of the Shares
more than two  years  after  the  grant  date and more  than one year  after the
exercise date, the difference between the sale price and the exercise price will
be taxed as capital gain or loss.  If the  participant  exercises the option and
then later sells or otherwise  disposes of the Shares before the end of the two-
or one-year  holding  periods  described  above,  he or she generally  will have
ordinary  income at the time of the sale equal to the fair  market  value of the
Shares on the  exercise  date (or the sale price,  if less)  minus the  exercise
price of the option. Any additional gain or loss will be capital gain or loss.

     Stock Appreciation Rights

     No taxable income is reportable when a stock  appreciation right is granted
to a  participant.  Upon  exercise,  the  participant  generally  will recognize
ordinary  income in an amount equal to the amount of cash  received and the fair
market value of any Shares received. Any additional gain or loss recognized upon
any later disposition of the Shares would be capital gain or loss.

     Restricted Stock, Restricted Stock Units and Performance Shares

     A  participant  will not have  taxable  income upon grant  unless he or she
elects to be taxed at that time.  Instead,  he or she generally  will  recognize
ordinary  income at the time of vesting  equal to the fair market  value (on the
vesting  date) of the  Shares or cash  received  minus any  amount  paid for the
Shares.

     Tax Effect for the Company

     The Company  generally  will be entitled to a tax  deduction in  connection
with an Award  under  the 2005 Plan in an amount  equal to the  ordinary  income
realized by a participant and at the time the participant recognizes such income
(for example,  the exercise of a nonqualified stock option). As discussed above,
special  rules  limit  the  deductibility  of  compensation  paid  to our  Chief
Executive  Officer  and to each of our four most  highly  compensated  executive
officers.


                                       28


However,  the 2005 Plan has been designed to permit the  Administrator  to grant
Awards that qualify as  performance-based  compensation  under  Section  162(m),
thereby  permitting  the Company to receive a federal  income tax  deduction  in
connection with such Awards.

Amendment and Termination of the Plan

     The Board generally may amend, alter, suspend or terminate the 2005 Plan at
any time and for any  reason.  However,  no  amendment,  alter,  suspension,  or
termination  may impair the rights of any  participant  in the 2005 Plan without
his or her consent.  Amendments  will be contingent on  stockholder  approval if
required by applicable law.  Unless  terminated  earlier by the Board,  the 2005
Plan will  continue  in effect  until ten (10) years  following  the date of the
Board of Director's adoption of the 2005 Plan.

Summary

     We believe  strongly that the approval of the 2005 Plan is essential to our
continued success.  Awards such as those provided under the 2005 Plan constitute
an important incentive and help us to attract and retain people whose skills and
performance  are critical to our success.  Our  employees  and directors are our
most  important  asset.  The  Company's  2000 Stock Option Plan has only 518,803
shares remaining available for issuance. As a result, if the stockholders do not
approve the 2005 Plan,  the Company  will be severely  limited in its ability to
make any  discretionary  option or other  equity  award  grants  under an equity
incentive  plan to assist in recruiting  and retaining  personnel.  The board of
directors  believes  that the 2005 Plan is vital to our  ability to attract  and
retain  outstanding  and highly skilled  individuals to work for the Company and
serve on our board of directors.

     THE BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS THAT THE SHAREHOLDERS  VOTE
"FOR" PROPOSAL 3.


                                       29


                                   PROPOSAL 4
                         RATIFICATION OF APPOINTMENT OF
                  INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

     The audit  committee of the board of directors  has  appointed BDO Seidman,
LLP,  independent  registered  public accounting firm, to audit the consolidated
financial  statements  of the Company for the fiscal  year ending  December  31,
2005.

     Deloitte & Touche LLP previously audited the Company's financial statements
from fiscal  1991  through  the fiscal  year ended  January 3, 2004.  Deloitte &
Touche LLP  resigned  effective  as of August 23,  2004.  BDO  Seidman,  LLP was
selected by the audit committee to serve as the Company's independent registered
public accounting firm effective as of September 3, 2004.

     The reports of Deloitte & Touche LLP on the Company's financial  statements
for the fiscal years ended  December 28, 2002 and January 3, 2004 do not contain
an adverse opinion or a disclaimer of opinion, and are not qualified or modified
as to  uncertainty,  audit  scope or  accounting  principles,  except  that such
reports  include  an  explanatory  paragraph  relating  to a change in method of
accounting for goodwill and other intangible assets.

     During the fiscal years ended  December  28, 2002 and January 3, 2004,  and
through  August 23, 2004,  there were no  disagreements  between the Company and
Deloitte & Touche  LLP on any  matter of  accounting  principles  or  practices,
financial   statements   disclosure,   or  auditing  scope  or  procedure  which
disagreements,  if not  resolved to the  satisfaction  of Deloitte & Touche LLP,
would have caused Deloitte & Touche LLP to make reference  thereto in the firm's
reports on the Company's financial statements for such periods. In addition,  no
reportable  events, as defined in Item 304 (a)(1)(v) of Regulation S-K, occurred
during the Company's two most recent fiscal years.

     Representatives  of BDO  Seidman,  LLP are  expected  to be  present at the
Company's annual meeting with the opportunity to make a statement if they desire
to do so, and are also  expected  to be  available  to  respond  to  appropriate
questions.

     Audit Fees

     The following table  summarizes the aggregate fees that the Company expects
to pay BDO  Seidman,  LLP for  fiscal  2004 and fees  billed to the  Company  by
Deloitte & Touche LLP for fiscal 2003 and 2002.


Type of fees                Fiscal 2004(5)     Fiscal 2003   Fiscal 2002
----------                  --------------     -----------   -----------
Audit Fees(1)                $     221,335     $   263,680   $   264,239
Audit-Related Fees(2)                4,400              --            --
Tax Fees(3)                             --         127,690       222,255
All Other Fees(4)                       --           7,500            --
                            --------------     -----------   -----------
Total Fees                   $     225,735     $   398,870   $   486,494
                            ==============     ===========   ===========
------------------------------

(1)  Fees for audit services consist of:

     o    Audit of the Company's annual financial statements

     o    Reviews of the Company's quarterly financial statements

     o    Statutory and regulatory  audits,  consents and other services related
          to Securities and Exchange Commission filings

(2)  Fees  for  audit-related  services  billed  in  fiscal  2004  consisted  of
     consultations on Securities and Exchange Commission comment letters

(3)  Fees for tax services  billed in fiscal 2003  consisted  of tax  compliance
     assistance,  transfer pricing  documentation and assistance with tax return
     filings in certain foreign jurisdictions

(4)  All other fees consisted of training on the  requirements of Section 404 of
     the Sarbanes-Oxley Act of 2002

(5)  In fiscal 2004, Deloitte & Touche LLP billed the Company $74,036,  $57,330,
     $13,913  and  $0  for  audit,  audit-related,   tax  and  all  other  fees,
     respectively.


                                       30


     In  considering  the nature of the  services  provided  by the  independent
registered public accountants, the audit committee determined that such services
are  compatible  with the provision of  independent  audit  services.  The audit
committee  discussed  these  services  with the  independent  registered  public
accountants  and the Company's  management to determine  that they are permitted
under the rules and regulations concerning auditors' independence promulgated by
the Securities and Exchange  Commission to implement the  Sarbanes-Oxley  Act of
2002, as well as the American Institute of Certified Public Accountants.

Audit Committee Pre-Approval Policy

     Pursuant  to  the  audit  committee  charter,   the  audit  committee  must
pre-approve all audit and non-audit services,  and the related fees, provided to
the Company by its  independent  auditors,  or  subsequently  approve  non-audit
services in those  circumstances  where a subsequent  approval is necessary  and
permissible  under the Exchange Act or the rules of the  Securities and Exchange
Commission.  Accordingly, the audit committee pre-approved all services and fees
provided  by  Deloitte & Touche LLP and BDO  Seidman,  LLP during the year ended
January  1, 2005 and has  concluded  that the  provision  of these  services  is
compatible with the accountants' independence.

Matters Not Required to be Submitted to Security Holders

     Approval by the shareholders of the selection of the independent registered
public accounting firm is not required,  but the audit committee  believes it is
desirable as a matter of good corporate  governance to submit this matter to the
shareholders.  If holders of a majority  of the  common  stock  represented  and
voting at the annual meeting do not ratify the  appointment of BDO Seidman,  LLP
as the Company's  independent  registered  public accounting firm for the fiscal
year ending  December 31, 2005,  the audit  committee  will consider  whether it
should select another independent registered public accounting firm.

Vote Required

     As a matter of good  corporate  governance,  the  Company  is  seeking  the
affirmative  vote of the  holders  of a majority  of the shares of common  stock
represented and voting at the annual meeting to approve this proposal.

     THE BOARD OF DIRECTORS UNANIMOUSLY  RECOMMENDS THAT SHAREHOLDERS VOTE "FOR"
THE  RATIFICATION  OF THE  APPOINTMENT  OF  BDO  SEIDMAN,  LLP AS THE  COMPANY'S
INDEPENDENT  REGISTERED  PUBLIC  ACCOUNTING  FIRM  FOR THE  FISCAL  YEAR  ENDING
DECEMBER 31, 2005.



                                       31


OTHER MATTERS

     The  Company  knows of no  other  matters  to be  submitted  to the  annual
meeting. If any other matters properly come before the annual meeting, it is the
intention  of the persons  named in the  enclosed  proxy card to vote the shares
they represent as the board of directors may recommend.



                                                         THE BOARD OF DIRECTORS

Dated:  July __, 2005






                                       32



                            NANOMETRICS INCORPORATED

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                       2005 ANNUAL MEETING OF SHAREHOLDERS
                                 August 26, 2005

     The undersigned  shareholder(s) of Nanometrics  Incorporated,  a California
corporation,  hereby  acknowledges  receipt of the  Notice of Annual  Meeting of
Shareholders and Proxy Statement,  each dated July __, 2005, and hereby appoints
Vincent  J.  Coates  and  Paul  B.  Nolan,   and  each  of  them,   Proxies  and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in the
name of the undersigned, to represent the undersigned at the 2005 Annual Meeting
of  Shareholders of Nanometrics  Incorporated  to be held on Friday,  August 26,
2005 at 1:00 p.m.,  local time, at the principal  offices of the Company located
at 1550  Buckeye  Drive,  Milpitas,  California,  95035 and at any  adjournments
thereof,  and to vote all  shares  of common  stock  which  the  undersigned  is
entitled to vote on the matters set forth below:

ITEM 1.   Election of Directors:

         (  )    FOR all nominees listed below (except as indicated)

         (  )    WITHHOLD AUTHORITY to vote for all nominees listed below

IF YOU WISH TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL  NOMINEE,  STRIKE A
LINE THROUGH THAT NOMINEE'S NAME IN THE LIST BELOW:

         Vincent J. Coates     J. Thomas Bentley       John D. Heaton

Stephen J Smith     Edmond R. Ward       William G. Oldham      Norman V. Coates

ITEM 2.  Proposal to approve  the  reincorporation of the Company under the laws
         of the  State of Delaware through a  merger  with  Minor  League Merger
         Corporation, a wholly-owned subsidiary of the Company.

                  (  ) FOR            (  ) AGAINST             (  ) ABSTAIN

ITEM 3.  Proposal to approve the adoption of the Company's  2005 Employee  Stock
         Option Plan and the reservation  of  _________  shares of  common stock
         for issuance thereunder.

                  (  ) FOR            (  ) AGAINST             (  ) ABSTAIN

ITEM 4.  Proposal to ratify the appointment of BDO Seidman, LLP as the Company's
         independent registered public accounting firm for the fiscal year
         ending December 31, 2005:

                  (  ) FOR            (  ) AGAINST             (  ) ABSTAIN

(Continued and to be signed, on reverse side)




(Continued from other side)

     In their  discretion,  the Proxies are  authorized  to vote upon such other
business as may properly come before the meeting.

     THIS  BALLOT  WILL BE VOTED AS DIRECTED  OR, IF NO  CONTRARY  DIRECTION  IS
INDICATED, WILL BE VOTED "FOR" THE ELECTION OF DIRECTORS NAMED HEREIN, "FOR" THE
PROPOSALS  LISTED,  AND AS SAID PROXIES DEEM  ADVISABLE ON SUCH OTHER MATTERS AS
MAY COME BEFORE THE MEETING.

                   _____________________________________________________________
                   Typed or Printed Name(s)

                   _____________________________________________________________
                   Signature

                   _____________________________________________________________
                   Signature

                   _____________________________________________________________
                   Title, if applicable

                   _______________________________
                   Type and Number of Shares owned

                   Dated:___________________, 2005


THIS PROXY SHOULD BE MARKED, DATED, SIGNED BY THE SHAREHOLDER(S)  EXACTLY AS HIS
OR HER NAME  APPEARS  HEREON AND  RETURNED  PROMPTLY IN THE  ENCLOSED  ENVELOPE.
PERSONS SIGNING IN A FIDUCIARY  CAPACITY SHOULD SO INDICATE.  IF SHARES ARE HELD
BY JOINT TENANTS OR AS COMMUNITY PROPERTY, BOTH SHOULD SIGN.




                                  APPENDIX A


                            NANOMETRICS INCORPORATED

                           2005 EQUITY INCENTIVE PLAN

     1. Purposes of the Plan. The purposes of this Plan are:

         o   to attract and retain the best available personnel for positions of
             substantial responsibility,

         o   to provide additional incentive to Service Providers, and

         o   to promote the success of the Company's business.

         Awards  granted  under  the  Plan  may  be  Incentive   Stock  Options,
Nonstatutory  Stock  Options,   Restricted  Stock,  Stock  Appreciation  Rights,
Performance   Shares  and   Restricted   Stock  Units,   as  determined  by  the
Administrator at the time of grant.

     2. Definitions. As used herein, the following definitions shall apply:

         (a)  "Administrator"  means the Board or any of its Committees as shall
be administering the Plan, in accordance with Section 4 of the Plan.

         (b) "Annual Revenue" means the Company's or a business unit's net sales
for the Fiscal Year, determined in accordance with generally accepted accounting
principles.

         (c)  "Applicable   Laws"  means  the   requirements   relating  to  the
administration  of equity  compensation  plans under U.S. state  corporate laws,
U.S.  federal  and state  securities  laws,  the Code,  any  stock  exchange  or
quotation  system  on  which  the  Common  Stock is  listed  or  quoted  and the
applicable laws of any other country or  jurisdiction  where Awards are, or will
be, granted under the Plan.

         (d) "Award" means, individually or collectively, a grant under the Plan
of Options,  Restricted Stock, Stock Appreciation Rights,  Performance Shares or
Restricted Stock Units.

         (e) "Award Agreement" means the written or electronic agreement setting
forth the terms and provisions  applicable to each Award granted under the Plan.
The Award Agreement is subject to the terms and conditions of the Plan.

         (f) "Awarded Stock" means the Common Stock subject to an Award.

         (g) "Board" means the Board of Directors of the Company.




         (h)  "Cash  Position"  means  the  Company's  level  of cash  and  cash
equivalents.

         (i) "Change in Control"  means the  occurrence  of any of the following
events, in one or a series of related transactions:

             (i) any "person," as such term is used in Sections  13(d) and 14(d)
of the Exchange  Act,  other than the Company,  a subsidiary of the Company or a
Company  employee  benefit  plan,  including  any trustee of such plan acting as
trustee,  is or becomes the  "beneficial  owner" (as defined in Rule 13d-3 under
the  Exchange  Act),  directly  or  indirectly,  of  securities  of the  Company
representing  fifty  percent  (50%) or more of the combined  voting power of the
Company's then outstanding securities entitled to vote generally in the election
of directors; or

             (ii) the  consummation of a merger or  consolidation of the Company
or any direct or indirect  subsidiary of the Company with any other corporation,
other than a merger or consolidation which would result in the voting securities
of the Company  outstanding  immediately  prior thereto  continuing to represent
(either by remaining outstanding or by being converted into voting securities of
the  surviving  entity) at least fifty  percent  (50%) of the total voting power
represented  by the voting  securities of the Company or such  surviving  entity
outstanding immediately after such merger or consolidation; or

             (iii)  the  sale  or   disposition   by  the   Company  of  all  or
substantially all the Company's assets; or

             (iv) a change in the composition of the Board, as a result of which
fewer than a majority  of the  directors  are  Incumbent  Directors.  "Incumbent
Directors" shall mean directors who either (A) are Directors as of the date this
Plan is approved by the Board, or (B) are elected, or nominated for election, to
the Board with the  affirmative  votes of at least a majority  of the  Incumbent
Directors  and whose  election  or  nomination  was not in  connection  with any
transaction  described in (i) or (ii) above or in  connection  with an actual or
threatened proxy contest relating to the election of directors of the Company.

         (j) "Code" means the Internal Revenue Code of 1986, as amended.

         (k) "Committee"  means a committee of Directors  appointed by the Board
in accordance with Section 4 of the Plan.

         (l) "Common Stock" means the common stock of the Company.

         (m) "Company" means Nanometrics Incorporated, a California corporation.

         (n) "Consultant" means any person, including an advisor, engaged by the
Company or a Parent or Subsidiary to render  services and who is compensated for
such services.

                                                                             -2-



         (o) "Continuous  Status as a Service Provider" means the absence of any
interruption or termination of the employment or service  relationship  with the
Company or any Subsidiary.  Continuous Status as a Service Provider shall not be
considered  interrupted in the case of (i) medical leave, military leave, family
leave, or any other leave of absence approved by the Administrator, provided, in
each case,  that such leave does not result in termination of the employment and
service  relationship  with the Company or any  Subsidiary,  as the case may be,
under  the terms of the  respective  Company  policy  for such  leave;  however,
vesting  may be  tolled  while a Service  Provider  is on an  approved  leave of
absence under the terms of the respective Company policy for such leave; or (ii)
in the case of  transfers  between  locations  of the  Company  or  between  the
Company,  its  Parent or any  Subsidiary,  or any  successor.  For  purposes  of
Incentive  Stock  Options,   no  such  leave  may  exceed  ninety  days,  unless
reemployment upon expiration of such leave is guaranteed by statute or contract.
If reemployment upon expiration of a leave of absence approved by the Company is
not so  guaranteed,  then three (3) months  following the 91st day of such leave
any Incentive Stock Option held by the Participant  shall cease to be treated as
an  Incentive  Stock  Option  and  shall  be  treated  for  tax  purposes  as  a
Nonstatutory Stock Option.

         (p) "Director" means a member of the Board.

         (q)  "Disability"  means total and  permanent  disability as defined in
Section 22(e)(3) of the Code.

         (r) "Dividend Equivalent" means a credit,  payable in cash, made at the
discretion of the  Administrator,  to the account of a Participant  in an amount
equal to the cash dividends  paid on one Share for each Share  represented by an
Award held by such Participant.

         (s)  "Earnings  Per  Share"  means as to any  Performance  Period,  the
Company's or a business unit's Net Income,  divided by a weighted average number
of common  shares  outstanding  and dilutive  common  equivalent  shares  deemed
outstanding,   determined  in  accordance  with  generally  accepted  accounting
principles.

         (t)  "Employee"  means any person,  including  Officers and  Directors,
employed  by the Company or any Parent or  Subsidiary  of the  Company.  Neither
service as a Chairman nor as a Director  nor payment of a director's  fee by the
Company shall be sufficient to constitute "employment" by the Company.

         (u)  "Exchange  Act"  means the  Securities  Exchange  Act of 1934,  as
amended.

         (v)  "Exchange  Program"  means a program  under which (i)  outstanding
Awards are  surrendered  or  cancelled  in exchange  for Awards of the same type
(which  may have  lower  exercise  prices  and  different  terms),  Awards  of a
different  type,  and/or cash,  and/or (ii) the exercise price of an outstanding
Award is reduced.  The terms and  conditions  of any  Exchange  Program  will be
determined by the Administrator in its sole discretion.

                                                                             -3-



         (w) "Fair  Market  Value"  means,  as of any date,  the value of Common
Stock determined as follows:

             (i) If the Common Stock is listed on any established stock exchange
or a national market system,  including  without  limitation the Nasdaq National
Market or The Nasdaq SmallCap Market of The Nasdaq Stock Market, its Fair Market
Value shall be the closing sales price for such stock (or the closing bid, if no
sales were  reported) as quoted on such  exchange or system,  on the last market
trading day prior to the date of  determination,  as reported in The Wall Street
Journal or such other source as the Administrator deems reliable;

             (ii) If the  Common  Stock  is  regularly  quoted  by a  recognized
securities dealer but selling prices are not reported,  the Fair Market Value of
a Share of Common  Stock  shall be the mean  between  the high bid and low asked
prices for the Common Stock on the last market  trading day prior to the date of
determination; or

             (iii) In the absence of an established market for the Common Stock,
the Fair Market Value shall be determined in good faith by the Administrator.

         (x) "Fiscal Year" means a fiscal year of the Company.

         (y) "Individual  Performance Objective" means as to a Participant,  the
objective and measurable  goals set by a "management by objectives"  process and
approved by the Committee (in its discretion).

         (z) "Incentive  Stock Option" means an Option intended to qualify as an
incentive  stock  option  within the  meaning of Section 422 of the Code and the
regulations   promulgated   thereunder  and  is  expressly   designated  by  the
Administrator at the time of grant as an incentive stock option.

         (aa)  "Marketing  and Sales Expenses as a Percentage of Sales" means as
to any  Performance  Period,  the Company's or a business  unit's  marketing and
sales expenses  stated as a percentage of sales,  determined in accordance  with
generally accepted  accounting  principles. 

         (bb) "Net Income as a Percentage of Sales" means as to any  Performance
Period,  the Company's or a business unit's Net Income stated as a percentage of
sales, determined in accordance with generally accepted accounting principles.

         (cc) "Net Income" means as to any Performance  Period, the income after
taxes of the Company or a business unit  determined in accordance with generally
accepted  accounting  principles,  provided  that prior to the  beginning of the
Performance  Period,  the  Committee  shall  determine  whether any  significant
item(s)  shall be included or excluded from the  calculation  of Net Income with
respect to one or more Participants.

         (dd) "Nonstatutory Stock Option" means an Option that by its terms does
not qualify or is not intended to qualify as an Incentive Stock Option.

         (ee)  "Officer"  means a person who is an officer of the Company within
the  meaning  of Section 16 of the  Exchange  Act and the rules and  regulations
promulgated thereunder.

                                                                             -4-



         (ff) "Operating Cash Flow" means the Company's or a business unit's sum
of Net Income plus depreciation and amortization less capital  expenditures plus
changes in working capital comprised of accounts receivable,  inventories, other
current assets,  trade accounts  payable,  accrued  expenses,  product warranty,
advance payments from customers and long-term  accrued  expenses,  determined in
accordance with generally acceptable accounting principles.

         (gg) "Operating Income" means the Company's or a business unit's income
from  operations  determined in accordance  with generally  accepted  accounting
principles.  

         (hh) "Outside Director" means a Director who is not an Employee.

         (ii) "Option" means a stock option granted pursuant to the Plan.

         (jj)  "Participant"  means the holder of an  outstanding  Award granted
under the Plan.

         (kk) "Parent"  means a "parent  corporation,"  whether now or hereafter
existing, as defined in Section 424(e) of the Code.

         (ll)  "Performance  Goals"  means the  goal(s)  (or  combined  goal(s))
determined  by  the  Committee  (in  its  discretion)  to  be  applicable  to  a
Participant  with  respect to an Award.  As  determined  by the  Committee,  the
Performance  Goals  applicable  to an Award may provide for a targeted  level or
levels of achievement  using one or more of the following  measures:  (a) Annual
Revenue, (b) Cash Position,  (c) Earnings Per Share, (d) Individual  Performance
Objectives,  (e) Marketing and Sales Expenses as a Percentage of Sales,  (f) Net
Income as a Percentage of Sales,  (g) Net Income,  (h) Operating  Cash Flow, (i)
Operating  Income,  (j)  Return on Assets,  (k) Return on Equity,  (l) Return on
Sales, and (m) Total Shareholder  Return.  The Performance Goals may differ from
Participant  to  Participant  and  from  Award to  Award.  The  Committee  shall
appropriately  adjust any evaluation of performance  under a Performance Goal to
exclude (i) any  extraordinary  non-recurring  items as described in  Accounting
Principles  Board Opinion No. 30 and/or in management's  discussion and analysis
of financial  conditions  and results of  operations  appearing in the Company's
annual report to shareholders for the applicable year, or (ii) the effect of any
changes in accounting  principles  affecting the Company's or a business  units'
reported  results.  Any criteria  used may be measured,  as  applicable,  (i) in
absolute terms, (ii) in relative terms  (including,  but not limited to, passage
of time  and/or  against  another  company or  companies),  (iii) on a per-share
basis,  (iv) against the  performance of the Company as a whole or of a business
unit of the  Company,  and/or (v) to the extent not  otherwise  specified by the
definition of the Performance Goal, on a pre-tax or after-tax basis.


         (mm)  "Performance  Period" means the time period of any Fiscal Year or
such longer period as determined by the Committee in its sole discretion  during
which the performance objectives must be met.

         (nn)  "Performance  Share" means a performance share Award granted to a
Participant pursuant to Section 14.

                                                                             -5-



         (oo) "Period of Restriction" means the period during which the transfer
of Shares of Restricted  Stock are subject to  restrictions  and therefore,  the
Shares are subject to a substantial risk of forfeiture. Such restrictions may be
based on the  passage of time  (including  the  continuation  of  employment  or
service), the achievement of target levels of performance,  or the occurrence of
other events as determined by the Administrator.

         (pp) "Plan" means this 2005 Equity Incentive Plan.

         (qq)  "Restricted  Stock" means shares of Common Stock granted pursuant
to Section 12 of the Plan, as evidenced by an Award Agreement.

         (rr) "Restricted Stock Unit" means a bookkeeping entry  representing an
amount equal to the Fair Market Value of one Share,  granted pursuant to Section
13. Each Restricted  Stock Unit represents an unfunded and unsecured  obligation
of the  Company.  

         (ss) "Return on Assets" means the percentage  equal to the Company's or
a business unit's  Operating Income before  incentive  compensation,  divided by
average net Company or business  unit,  as  applicable,  assets,  determined  in
accordance with generally accepted accounting principles.

         (tt) "Return on Equity" means the percentage equal to the Company's Net
Income divided by average  shareholder's  equity,  determined in accordance with
generally accepted accounting principles.

         (uu) "Return on Sales" means the percentage equal to the Company's or a
business unit's Operating Income before incentive  compensation,  divided by the
Company's  or  the  business  unit's,  as  applicable,  revenue,  determined  in
accordance with generally accepted accounting principles.

         (vv) "Rule 16b-3" means Rule 16b-3 of the Exchange Act or any successor
to Rule 16b-3,  as in effect when  discretion is being exercised with respect to
the Plan.

         (ww) "Section 16(b)" means Section 16(b) of the Exchange Act.

         (xx) "Service Provider" means an Employee, Director or Consultant.

         (yy)  "Share"  means  a share  of the  Common  Stock,  as  adjusted  in
accordance with Section 17 of the Plan.

         (zz) "Stock  Appreciation  Right" or "SAR"  means a stock  appreciation
right  granted  pursuant  to  Section  10  below. 

         (aaa)  "Subsidiary"  means a "subsidiary  corporation",  whether now or
hereafter existing, as defined in Section 424(f) of the Code.

                                                                             -6-



         (bbb) "Total  Shareholder  Return"  means the total  return  (change in
share price plus  reinvestment  of any  dividends)  of a share of the  Company's
common stock.

     3. Stock  Subject to the Plan.  Subject to the  provisions of Section 17 of
the Plan, the maximum aggregate number of Shares which may issued under the Plan
is 1,200,000 Shares, plus an annual increase to be added on the first day of the
Company's  Fiscal Year for three years  beginning  in 2006 and ending  after the
2008 annual increase equal to the least of (i) 3% of the  outstanding  Shares on
such  date or  (ii)  an  amount  determined  by the  Board.  The  Shares  may be
authorized, but unissued, or reacquired Common Stock.

     Any  Shares  subject  to  Options  or SARs  shall be  counted  against  the
numerical limits of this Section 3 as one Share for every Share subject thereto.
Any  Shares of  Restricted  Stock or Shares  subject  to  Performance  Shares or
Restricted  Stock Units with a per share or unit purchase  price lower than 100%
of Fair Market Value on the date of grant shall be counted against the numerical
limits of this Section 3 as two Shares for every one Share subject  thereto.  To
the extent that a Share that was subject to an Award that  counted as two Shares
against the Plan reserve  pursuant to the  preceding  sentence is recycled  back
into the Plan  under the next  paragraph  of this  Section  3, the Plan shall be
credited with two Shares.

     If an Award expires or becomes  unexercisable without having been exercised
in full or is surrendered  pursuant to an Exchange Program,  or, with respect to
Options,  Restricted  Stock,  Performance  Shares or Restricted  Stock Units, is
forfeited to or  repurchased  by the  Company,  the  unpurchased  Shares (or for
Awards other than Options and SARs, the forfeited or  repurchased  shares) which
were subject  thereto shall become  available for future grant or sale under the
Plan (unless the Plan has  terminated).  With respect to SARs,  Shares  actually
issued  pursuant to an SAR as well as the Shares  withheld  to pay the  exercise
price shall cease to be available under the Plan. Shares that have actually been
issued  under the Plan  under any Award  shall not be  returned  to the Plan and
shall not become  available for future  distribution  under the Plan;  provided,
however,  that if Shares of Restricted Stock,  Performance  Shares or Restricted
Stock Units are  repurchased by the Company at their original  purchase price or
are  forfeited to the Company,  such Shares  shall become  available  for future
grant under the Plan.  Shares used to pay the exercise price of an Option or the
purchase price of Restricted  Stock shall not become  available for future grant
or sale under the Plan. Shares used to satisfy tax withholding obligations shall
not become  available  for future grant or sale under the Plan. To the extent an
Award under the Plan is paid out in cash rather  than stock,  such cash  payment
shall not reduce the number of Shares available for issuance under the Plan. Any
payout of Dividend Equivalents, because they are payable only in cash, shall not
reduce the number of Shares  available for issuance under the Plan.  Conversely,
any forfeiture of Dividend  Equivalents  shall not increase the number of Shares
available for issuance under the Plan.

     4. Administration of the Plan.

         (a) Procedure.

             (i)  Multiple   Administrative   Bodies.  The  Board  or  different
Committees with respect to different groups of Service  Providers may administer
the Plan.

                                                                             -7-



             (ii)  Section  162(m).   To  the  extent  that  the   Administrator
determines  it  to  be  desirable  to  qualify  Awards   granted   hereunder  as
"performance-based  compensation"  within the  meaning of Section  162(m) of the
Code,  the Plan shall be  administered  by a Committee  of two or more  "outside
directors" within the meaning of Section 162(m) of the Code.

             (iii) Rule 16b-3. To the extent  desirable to qualify  transactions
hereunder as exempt under Rule 16b-3,  the transactions  contemplated  hereunder
shall be structured to satisfy the  requirements for exemption under Rule 16b-3.

             (iv) Other  Administration.  Other than as provided above, the Plan
shall be administered by (a) the Board or (b) a Committee, which committee shall
be constituted  to satisfy  Applicable  Laws.  

         (b) Powers of the Administrator. Subject to the provisions of the Plan,
and in the case of a Committee,  subject to the specific duties delegated by the
Board to such  Committee,  the  Administrator  shall have the authority,  in its
discretion:

             (i) to determine the Fair Market Value;

             (ii) to select the Service  Providers to whom Awards may be granted
hereunder;

             (iii)  to  determine  the  number  of  shares  of  Common  Stock or
equivalent units to be covered by each Award granted hereunder;

             (iv) to approve forms of Award Agreement for use under the Plan;

             (v) to determine the terms and conditions,  not  inconsistent  with
the terms of the Plan, of any Award granted hereunder. Such terms and conditions
include, but are not limited to, the exercise price, the date of grant, the time
or times when Awards may be  exercised  (or are  earned)  (which may be based on
performance  criteria),   any  vesting  acceleration  or  waiver  of  forfeiture
restrictions,  and any  restriction  or  limitation  regarding  any Award or the
Shares   relating   thereto,   based  in  each  case  on  such  factors  as  the
Administrator, in its sole discretion, shall determine;

             (vi) to institute an Exchange Program;  however,  the Administrator
may not institute an Exchange Program without shareholder approval.

             (vii) to construe  and  interpret  the terms of the Plan and Awards
granted pursuant to the Plan;

             (viii) to  prescribe,  amend  and  rescind  rules  and  regulations
relating to the Plan,  including  rules and  regulations  relating to  sub-plans
established  for the  purpose  of  satisfying  applicable  foreign  laws  and/or
qualifying for preferred tax treatment under foreign tax laws;

                                                                             -8-



             (ix) to modify or amend each Award (subject to Section 19(c) of the
Plan),  including  the  discretionary  authority to extend the  post-termination
exercisability  period of Options and SARs longer than is otherwise provided for
in the Plan;

             (x) to allow Participants to satisfy withholding tax obligations by
electing to have the Company  withhold from the Shares or cash to be issued upon
exercise of an Option, SAR or right to purchase Restricted Stock or upon vesting
or payout of another  Award,  that number of Shares or cash having a Fair Market
Value equal to the minimum amount required to be withheld. The Fair Market Value
of the Shares to be withheld  shall be determined on the date that the amount of
tax to be withheld is to be  determined.  All elections by a Participant to have
Shares or cash  withheld for this  purpose  shall be made in such form and under
such conditions as the Administrator may deem necessary or advisable;

             (xi) to  determine  whether  Awards will be adjusted  for  Dividend
Equivalents;

             (xii) to  authorize  any person to execute on behalf of the Company
any instrument  required to effect the grant of an Award  previously  granted by
the Administrator; and

             (xiii)  to  make  all  other  determinations  deemed  necessary  or
advisable for administering the Plan.

         (c) Effect of Administrator's Decision. The Administrator's  decisions,
determinations   and   interpretations   shall  be  final  and  binding  on  all
Participants and any other holders of Awards.

     5.  Eligibility.  Awards may be granted  to  Service  Providers;  provided,
however, that Incentive Stock Options may be granted only to Employees.

     6. No Employment Rights. Neither the Plan nor any Award shall confer upon a
Participant any right with respect to continuing the Participant's  relationship
as an Employee or other Service  Provider with the Company or its  Subsidiaries,
nor  shall  they  interfere  in any way  with  the  Participant's  right  or the
Company's  or  Subsidiary's  right,  as the  case  may  be,  to  terminate  such
relationship at any time, with or without cause.

     7. Code Section 162(m) Provisions.

         (a) Option and SAR Annual Share Limit. No Participant shall be granted,
in any Fiscal Year, Options and Stock Appreciation  Rights to purchase more than
500,000 Shares;  provided,  however,  that such limit shall be 250,000 Shares in
the Participant's first Fiscal Year of Company service.

         (b)  Restricted  Stock,  Performance  Share and  Restricted  Stock Unit
Annual Limit.  No Participant  shall be granted,  in any Fiscal Year,  more than
250,000 Shares in the aggregate of the following:  (i)  Restricted  Stock,  (ii)
Performance  Shares, or (iii) Restricted Stock Units;  provided,  however,  that
such limit shall be 125,000  Shares in the  Participant's  first  Fiscal Year of
Company service.

                                                                             -9-



         (c) Section 162(m) Performance Restrictions. For purposes of qualifying
grants of Restricted  Stock,  Performance  Shares or  Restricted  Stock Units as
"performance-based   compensation"   under  Section  162(m)  of  the  Code,  the
Administrator,   in  its  discretion,   may  set  restrictions  based  upon  the
achievement  of Performance  Goals.  The  Performance  Goals shall be set by the
Administrator  on or before the latest date permissible to enable the Restricted
Stock,   Performance   Shares  or   Restricted   Stock   Units  to   qualify  as
"performance-based  compensation"  under Section 162(m) of the Code. In granting
Restricted  Stock,  Performance  Shares  or  Restricted  Stock  Units  which are
intended to qualify under Section  162(m) of the Code, the  Administrator  shall
follow any  procedures  determined  by it from time to time to be  necessary  or
appropriate  to ensure  qualification  of the Award under Section  162(m) of the
Code (e.g., in determining the Performance Goals).

         (d) Changes in  Capitalization.  The numerical  limitations in Sections
7(a) and (b) shall be adjusted  proportionately in connection with any change in
the Company's capitalization as described in Section 17(a).

         (e) If an Award is  cancelled  in the same  Fiscal Year in which it was
granted (other than in connection with a transaction  described in Section 17 of
the Plan),  the cancelled  Award will be counted against the limits set forth in
subsections  (a) and (b) above.  For this purpose,  if the exercise  price of an
Option is reduced,  the  transaction  will be treated as a  cancellation  of the
Option and the grant of a new Option.

     8. Term of Plan.  Subject to Section 23 of the Plan,  the Plan will  become
effective upon its adoption by the Board.  It will continue in effect for a term
of ten (10) years unless terminated earlier under Section 19 of the Plan.

     9. Stock Options.

         (a) Type of  Option.  Each  Option  shall be  designated  in the  Award
Agreement as either an Incentive  Stock Option or a  Nonstatutory  Stock Option.
However,  not withstanding  such  designation,  to the extent that the aggregate
Fair Market Value of the Shares with respect to which  Incentive  Stock  Options
are exercisable  for the first time by the Participant  during any calendar year
(under all plans of the Company and any Parent or Subsidiary)  exceeds $100,000,
such Options shall be treated as  Nonstatutory  Stock  Options.  For purposes of
this Section  9(a),  Incentive  Stock Options shall be taken into account in the
order in which they were  granted.  The Fair Market Value of the Shares shall be
determined as of the time the Option with respect to such Shares is granted.

         (b)  Term.  The  term of each  Option  shall  be  stated  in the  Award
Agreement.  In the case of an Incentive Stock Option, the term shall be ten (10)
years  from the date of grant or such  shorter  term as may be  provided  in the
Award Agreement. Moreover, in the case of an Incentive Stock Option granted to a
Participant  who, at the time the Incentive Stock Option is granted,  owns stock
representing  more than ten percent (10%) of the total combined  voting power of

                                                                            -10-



all classes of stock of the Company or any Parent or Subsidiary, the term of the
Incentive  Stock  Option  shall be five (5) years from the date of grant or such
shorter term as may be provided in the Award Agreement.

         (c) Option Exercise Price and Consideration.

             (i) Exercise Price.  The per Share exercise price for the Shares to
be  issued  pursuant  to  exercise  of an  Option  will  be  determined  by  the
Administrator, subject to the following:

                   (1) In the case of an Incentive  Stock  Option  granted to an
Employee  who, at the time the  Incentive  Stock  Option is granted,  owns stock
representing  more than ten percent  (10%) of the voting power of all classes of
stock of the Company or any Parent or  Subsidiary,  the per Share exercise price
will be no less  than  110% of the Fair  Market  Value  per Share on the date of
grant.

                   (2) In the case of all other Options,  the per Share exercise
price will be no less than 100% of the Fair  Market  Value per Share on the date
of grant.

                   (3)  Notwithstanding  the  foregoing,  Options may be granted
with a per Share  exercise  price of less than 100% of the Fair Market Value per
Share on the date of grant pursuant to a merger or other corporate transaction.

             (ii) Waiting  Period and Exercise  Dates.  At the time an Option is
granted,  the Administrator  shall fix the period within which the Option may be
exercised and shall determine any conditions  which must be satisfied before the
Option may be exercised.

             (iii) Form of Consideration.  The Administrator shall determine the
acceptable form of consideration for exercising an Option,  including the method
of payment.  In the case of an Incentive Stock Option,  the Administrator  shall
determine the acceptable form of consideration at the time of grant.  Subject to
Applicable  Laws,  such  consideration  may consist  entirely of:

                   (1) cash;

                   (2) check;

                   (3) promissory note;

                   (4) other  Shares  which have a Fair Market Value on the date
of surrender  equal to the  aggregate  exercise  price of the Shares as to which
said Option shall be exercised and which meet the conditions  established by the
Administrator  to avoid adverse  accounting  consequences  (as determined by the
Administrator);

                                                                            -11-



                   (5)  consideration  received by the Company  under a cashless
exercise program implemented by the Company in connection with the Plan;

                   (6) a reduction in the amount of any Company liability to the
Participant,   including  any  liability   attributable  to  the   Participant's
participation  in  any   Company-sponsored   deferred  compensation  program  or
arrangement;

                   (7) any combination of the foregoing methods of payment;

                   (8) such other  consideration  and method of payment  for the
issuance of Shares to the extent permitted by Applicable Laws; or

                   (9) any combination of the foregoing methods of payment.

     10. Stock Appreciation Rights.

         (a) Grant of SARs.  Subject to the terms and  conditions of the Plan, a
SAR may be  granted to  Service  Providers  at any time and from time to time as
will be determined by the Administrator, in its sole discretion.

         (b) Number of Shares. The Administrator  will have complete  discretion
to determine the number of SARs granted to any Service Provider,  subject to the
limits set forth in Section 7.

         (c) Exercise Price and Other Terms. The  Administrator,  subject to the
provisions of the Plan, will have complete discretion to determine the terms and
conditions of SARs granted under the Plan.

         (d)  Exercise  of SARs.  SARs  will be  exercisable  on such  terms and
conditions as the Administrator, in its sole discretion, will determine.

         (e) SAR  Agreement.  Each  SAR  grant  will be  evidenced  by an  Award
Agreement  that  will  specify  the  exercise  price,  the term of the SAR,  the
conditions   of  exercise,   and  such  other  terms  and   conditions   as  the
Administrator, in its sole discretion, will determine.

         (f)  Expiration of SARs. An SAR granted under the Plan will expire upon
the date determined by the Administrator,  in its sole discretion, and set forth
in the Award Agreement;  provided, however, that no SAR will have a term of more
than ten (10) years fom the date of grant.

         (g) Payment of SAR Amount.  Upon exercise of an SAR, a Participant will
be  entitled to receive  payment  from the  Company in an amount  determined  by
multiplying:

             (i) The difference  between the Fair Market Value of a Share on the
date of exercise over the exercise price; times

             (ii)  The  number  of  Shares  with  respect  to  which  the SAR is
exercised.

                                                                            -12-




         (h) Form of Payment. The Company's obligation arising upon the exercise
of a SAR may be paid in Common Stock or in cash, or in any combination of Common
Stock and cash, as the  Administrator,  in its sole  discretion,  may determine.
Shares  issued  upon the  exercise of a SAR shall be valued at their Fair Market
Value as of the date of exercise.

     11. Exercise of Option or SAR.

         (a) Procedure for Exercise; Rights as a Shareholder.  Any Option or SAR
granted hereunder shall be exercisable according to the terms of the Plan and at
such times and under such conditions as determined by the  Administrator and set
forth in the Award Agreement. An Option may not be exercised for a fraction of a
Share.

     An Option or SAR shall be deemed exercised when the Company  receives:  (i)
written or electronic  notice of exercise (in  accordance  with the terms of the
Option or SAR) from the person  entitled to exercise the Option or SAR, and (ii)
full payment for the Shares with respect to which the Option is exercised.  Full
payment may consist of any consideration and method of payment authorized by the
Administrator  and permitted by the Award Agreement and the Plan.  Shares issued
upon exercise of an Option or SAR shall be issued in the name of the Participant
or, if requested by the  Participant,  in the name of the Participant and his or
her spouse.  Until the Shares are issued (as evidenced by the appropriate  entry
on the  books  of the  Company  or of a duly  authorized  transfer  agent of the
Company),  no  right to vote or  receive  dividends  or any  other  rights  as a
shareholder shall exist with respect to the Awarded Stock,  notwithstanding  the
exercise of the Option. The Company shall issue or cause to be issued (and which
issuance may be in electronic  entry form) such Shares promptly after the Option
is exercised. No adjustment will be made for a dividend or other right for which
the record date is prior to the date the Shares are  issued,  except as provided
in Section 17 of the Plan.

     Exercising  an Option in any  manner  shall  decrease  the number of Shares
thereafter  available,  both for  purposes  of the Plan and for sale  under  the
Option, by the number of Shares as to which the Option is exercised. Exercise of
a SAR in any  manner  shall,  to the extent  the SAR is  exercised,  result in a
decrease  in the  number of  Shares  which  thereafter  shall be  available  for
purposes of the Plan, and the SAR shall cease to be exercisable to the extent it
has been exercised.

         (b)  Termination  of  Continuous  Status  as a Service  Provider.  Upon
termination of a Participant's  Continuous  Status as a Service  Provider (other
than  termination  by  reason of the  Participant's  death or  Disability),  the
Participant  may exercise his or her Option or SAR within such period of time as
is  specified  in the Award  Agreement to the extent that the Award is vested on
the date of  termination  (but in no event later than the expiration of the term
of such  Award  as set  forth  in the  Award  Agreement).  In the  absence  of a
specified time in the Option Agreement,  the Option shall remain exercisable for
three (3) months following the Participant's  termination.  If the Option or SAR
is not so exercised  within the time specified  herein,  the Option or SAR shall
terminate,  and the  Shares  covered by such  Option or SAR shall  revert to the
Plan.  Unless  otherwise  provided  by  the  Administrator,  if on the  date  of
termination the Participant is not vested as to his or her entire Option or SAR,
the Shares  covered by the unvested  portion of the Option or SAR will revert to
the Plan on the date one (1)  month  following  the  Participant's  termination.
Notwithstanding the foregoing, in no event shall an Option or SAR be exercisable
after  the  expiration  of the  term  of the  Award  as  provided  in the  Award
Agreement.

                                                                            -13-



         (c) Disability of Participant.  If a Participant  terminates his or her
Continuous  Status as a Service  Provider as a result of his or her  Disability,
the Participant may exercise his or her Option or SAR within such period of time
as is specified in the Award Agreement to the extent the Option or SAR is vested
on the date of  termination  (but in no event later than the  expiration  of the
term of such Option or SAR as set forth in the Award Agreement).  In the absence
of a  specified  time in the Award  Agreement,  the  Option or SAR shall  remain
exercisable for twelve (12) months following the Participant's termination.  If,
after  termination,  the Participant  does not exercise his or her Option or SAR
within the time specified  herein,  the Option or SAR shall  terminate,  and the
Shares covered by such Option or SAR shall revert to the Plan.  Unless otherwise
provided by the Administrator,  if on the date of termination the Participant is
not vested as to his or her  entire  Option or SAR,  the  Shares  covered by the
unvested  portion of the  Option or SAR will  revert to the Plan on the date one
(1)  month  following  the  Participant's   termination.   Notwithstanding   the
foregoing,  in no  event  shall  an  Option  or SAR  be  exercisable  after  the
expiration of the term of the Award as provided in the Award Agreement.

         (d)  Death  of  Participant.  If a  Participant  dies  while a  Service
Provider,  the Option or SAR may be exercised  following the Participant's death
within such period of time as is  specified  in the Award  Agreement  (but in no
event may the option be exercised  later than the expiration of the term of such
Option  or SAR as  set  forth  in the  Award  Agreement),  by the  Participant's
designated  beneficiary,  provided such beneficiary has been designated prior to
Participant's  death  in a form  acceptable  to the  Administrator.  If no  such
beneficiary  has been  designated  by the  Participant,  then such Option may be
exercised by the personal  representative of the Participant's  estate or by the
person(s) to whom the Option or SAR is transferred pursuant to the Participant's
will or in accordance with the laws of descent and distribution.  In the absence
of a  specified  time in the Award  Agreement,  the  Option or SAR shall  remain
exercisable for twelve (12) months following  Participant's death. If the Option
or SAR is not so exercised within the time specified  herein,  the Option or SAR
shall  terminate,  and the Shares  covered by such Option or SAR shall revert to
the Plan.  Unless  otherwise  provided by the  Administrator,  if on the date of
termination the Participant is not vested as to his or her entire Option or SAR,
the Shares  covered by the unvested  portion of the Option or SAR will revert to
the Plan on the date one (1)  month  following  the  Participant's  termination.
Notwithstanding the foregoing, in no event shall an Option or SAR be exercisable
after  the  expiration  of the  term  of the  Award  as  provided  in the  Award
Agreement.

     12. Restricted Stock.

         (a) Grant of Restricted  Stock.  Subject to the terms and provisions of
the Plan  (including the limits set forth in Section 7), the  Administrator,  at
any time and from time to time, may grant Shares of Restricted  Stock to Service
Providers in such amounts as the  Administrator,  in its sole  discretion,  will
determine.

         (b) Restricted Stock Agreement.  Each Award of Restricted Stock will be
evidenced by an Award Agreement that will specify the Period of Restriction, the
number  of  Shares  granted,   and  such  other  terms  and  conditions  as  the

                                                                            -14-



Administrator,  in its sole discretion, will determine. Unless the Administrator
determines otherwise,  Shares of Restricted Stock will be held by the Company as
escrow agent until the restrictions on such Shares have lapsed.

         (c) Transferability.  Unless determined otherwise by the Administrator,
Shares of Restricted  Stock may not be sold,  pledged,  assigned,  hypothecated,
transferred,  or disposed of in any manner  other than by will or by the laws of
descent or distribution until the end of the applicable Period of Restriction.

         (d) Other Restrictions. The Administrator,  in its sole discretion, may
impose  such other  restrictions  on Shares of  Restricted  Stock as it may deem
advisable or appropriate.

             (i) General  Restrictions.  The  Administrator may set restrictions
based upon the  achievement  of  Company-wide,  departmental,  business unit, or
individual  goals  (including,  but not  limited  to,  continued  employment  or
service),  applicable  federal  or state  securities  laws,  or any other  basis
determined by the Administrator in its discretion.

             (ii)  Section  162(m)  Performance  Restrictions.  For  purposes of
qualifying grants of Restricted Stock as "performance-based  compensation" under
Section  162(m)  of  the  Code,  the  Committee,  in  its  discretion,  may  set
restrictions  based upon the achievement of Performance  Goals.  The Performance
Goals shall be set by the Committee on or before the latest date  permissible to
enable the Restricted Stock to qualify as "performance-based compensation" under
Section  162(m) of the Code. In granting  Restricted  Stock which is intended to
qualify  under  Section  162(m) of the Code,  the  Committee  shall  follow  any
procedures  determined by it from time to time to be necessary or appropriate to
ensure  qualification  of the Restricted  Stock under Section 162(m) of the Code
(e.g., in determining the Performance Goals).

         (e)  Removal of  Restrictions.  Except as  otherwise  provided  in this
Section 12, Shares of Restricted  Stock covered by each  Restricted  Stock grant
made under the Plan will be released  from escrow as soon as  practicable  after
the last day of the Period of Restriction. The Administrator, in its discretion,
may accelerate the time at which any restrictions will lapse or be removed.

         (f) Voting Rights. During the Period of Restriction,  Service Providers
holding  Shares of Restricted  Stock granted  hereunder may exercise full voting
rights  with  respect  to those  Shares,  unless  the  Administrator  determines
otherwise.

         (g)   Dividends   and  Other   Distributions.   During  the  Period  of
Restriction,  Service  Providers  holding  Shares of  Restricted  Stock  will be
entitled to receive all dividends and other  distributions  paid with respect to
such  Shares  unless  otherwise  provided  in the Award  Agreement.  If any such
dividends or distributions are paid in Shares, the Shares will be subject to the
same  restrictions  on  transferability  and  forfeitability  as the  Shares  of
Restricted Stock with respect to which they were paid.

                                                                            -15-



         (h) Return of Restricted Stock to Company. On the date set forth in the
Award  Agreement,  the Restricted Stock for which  restrictions  have not lapsed
will revert to the Company and again will become  available  for grant under the
Plan.

     13. Restricted Stock Units.

         (a) Grant.  Restricted  Stock Units may be granted at any time and from
time to time as  determined by the  Administrator.  Each  Restricted  Stock Unit
grant shall be evidenced  by an Award  Agreement  that shall  specify such other
terms  and  conditions  as the  Administrator,  in its  sole  discretion,  shall
determine,  including all terms,  conditions,  and  restrictions  related to the
grant,  the number of Restricted  Stock Units  (subject to the  limitations  set
forth in Section 7) and the form of payout, which, subject to Section 13(d), may
be left to the discretion of the Administrator.

         (b) Vesting  Criteria  and Other  Terms.  The  Administrator  shall set
vesting criteria in its discretion,  which, depending on the extent to which the
criteria are met, will determine the number of Restricted  Stock Units that will
be paid out to the Participant.

             (i)  General  Restrictions.   The  Administrator  may  set  vesting
criteria based upon the  achievement  of  Company-wide,  departmental,  business
unit, or individual goals (including,  but not limited to, continued  employment
or service),  applicable  federal or state  securities  laws, or any other basis
determined by the Administrator in its discretion.

             (ii)  Section  162(m)  Performance  Restrictions.  For  purposes of
qualifying grants of Restricted Stock Units as "performance-based  compensation"
under Section  162(m) of the Code,  the Committee,  in its  discretion,  may set
performance  objectives  based upon the  achievement of Performance  Goals.  The
Performance  Goals  shall be set by the  Committee  on or before the latest date
permissible   to   enable   the   Restricted   Stock   Units   to   qualify   as
"performance-based  compensation"  under Section 162(m) of the Code. In granting
Restricted  Stock Units that are intended to qualify under Section 162(m) of the
Code, the Committee  shall follow any  procedures  determined by it from time to
time to be necessary or  appropriate to ensure  qualification  of the Restricted
Stock  Units  under  Section  162(m)  of the  Code  (e.g.,  in  determining  the
Performance Goals).

         (c) Earning Restricted Stock Units. Upon meeting the applicable vesting
criteria,  the Participant shall be entitled to receive a payout as specified in
the Award Agreement.  Notwithstanding the foregoing, at any time after the grant
of Restricted Stock Units, the Administrator, in its sole discretion, may reduce
or waive any vesting criteria that must be met to receive a payout.

         (d) Form and  Timing of  Payment.  Payment of earned  Restricted  Stock
Units  shall be made as soon as  practicable  after the date(s) set forth in the
Award  Agreement.  The  Administrator,  in its sole  discretion,  may pay earned
Restricted  Stock  Units in  cash,  Shares,  or a  combination  thereof.  Shares
represented by Restricted Stock Units that are fully paid in cash again shall be
available for grant under the Plan.

                                                                            -16-



         (e)  Cancellation.  On the date set forth in the Award  Agreement,  all
unearned  Restricted  Stock  Units  shall  be  forfeited  to  the  Company. 

     14. Performance Shares.

         (a) Grant of Performance Shares. Subject to the terms and conditions of
the Plan,  Performance Shares may be granted to Service Providers at any time as
shall be determined by the  Administrator,  in its sole  discretion.  Subject to
Section 7 hereof, the Administrator  shall have complete discretion to determine
the number of Shares subject to a Performance Share Award granted to any Service
Provider.

         (b) Value of Performance  Shares.  Each Performance  Share will have an
initial value equal to the Fair Market Value of a Share on the date of grant.

         (c) Performance  Objectives and Other Terms. The Administrator will set
performance objectives in its discretion which, depending on the extent to which
they are met, will determine the number or value of Performance Shares that will
be paid out to the Service  Providers.  Each Award of Performance Shares will be
evidenced by an Award Agreement that will specify the performance  period during
which the applicable objectives must be met, and such other terms and conditions
as the Administrator, in its sole discretion, will determine.

             (i) General  Restrictions.  The  Administrator  may set performance
objective based upon the  achievement of  Company-wide,  departmental,  business
unit, or individual goals (including,  but not limited to, continued  employment
or service),  applicable  federal or state  securities  laws, or any other basis
determined by the Administrator in its discretion.

             (ii)  Section  162(m)  Performance  Restrictions.  For  purposes of
qualifying  grants of  Performance  Shares as  "performance-based  compensation"
under Section  162(m) of the Code,  the Committee,  in its  discretion,  may set
performance  objectives  based upon the  achievement of Performance  Goals.  The
Performance  Goals  shall be set by the  Committee  on or before the latest date
permissible to enable the  Performance  Shares to qualify as  "performance-based
compensation"  under Section 162(m) of the Code. In granting  Performance Shares
that are intended to qualify  under  Section  162(m) of the Code,  the Committee
shall follow any  procedures  determined by it from time to time to be necessary
or appropriate to ensure  qualification of the Performance  Shares under Section
162(m) of the Code (e.g., in determining the Performance Goals).

         (d) Earning of Performance  Shares.  After the  applicable  Performance
Period has ended, the holder of Performance Shares will be entitled to receive a
payout of the number of Performance  Shares earned by the  Participant  over the
Performance  Period,  to be  determined as a function of the extent to which the
corresponding  performance  objectives have been achieved.  After the grant of a
Performance  Share, the  Administrator,  in its sole  discretion,  may reduce or
waive any performance objectives for such Performance Share.

                                                                            -17-



         (e) Form and Timing of Payment of Performance Shares. Payment of earned
Performance  Shares will be made as soon as practicable  after the expiration of
the applicable  Performance  Period. The Administrator,  in its sole discretion,
may pay earned  Performance Shares in the form of cash, in Shares (which have an
aggregate Fair Market Value equal to the value of the earned  Performance Shares
at the close of the applicable performance period) or in a combination thereof.

         (f)  Cancellation of Performance  Shares.  On the date set forth in the
Award Agreement,  all unearned or unvested  Performance Shares will be forfeited
to the Company, and again will be available for grant under the Plan.

     15.  Leaves of Absence.  Unless the  Administrator  provides  otherwise  or
except as  otherwise  required by  Applicable  Laws,  vesting of Awards  granted
hereunder shall cease commencing on the first day of any unpaid leave of absence
and shall only recommence upon return to active service.

     16.   Transferability  of  Awards.   Unless  determined  otherwise  by  the
Administrator  or as otherwise  provided in the Plan,  an Award may not be sold,
pledged, assigned, hypothecated, transferred, or disposed of in any manner other
than by will or by the laws of descent or  distribution,  and may be  exercised,
during  the  lifetime  of  the  Participant,  only  by the  Participant.  If the
Administrator  makes  an Award  transferable,  such  Award  shall  contain  such
additional terms and conditions as the Administrator deems appropriate.

     17.  Adjustments  Upon Changes in  Capitalization,  Dissolution,  Merger or
Change in Control.

         (a) Changes in  Capitalization.  Subject to any required  action by the
shareholders  of the Company,  the number of shares of Common  Stock  covered by
each outstanding  Award and the number of shares of Common Stock which have been
authorized  for issuance  under the Plan but as to which no Awards have yet been
granted or which have been returned to the Plan upon  cancellation or expiration
of an Award,  as well as the price per share, if any, of Common Stock covered by
each such  outstanding  Award and the 162(m) fiscal year share  issuance  limits
under Sections 7(a) and (b) hereof shall, shall be proportionately  adjusted for
any dividend or other distribution  (whether in the form of cash, Shares,  other
securities,  or other property),  recapitalization,  stock split,  reverse stock
split, reorganization,  merger, consolidation,  split-up, spin-off, combination,
repurchase,  or exchange of Shares or other securities of the Company,  or other
change in the corporate structure of the Company affecting the Shares should the
Committee  (in  its  sole  discretion)   determine  such  an  adjustment  to  be
appropriate  in order to prevent  dilution  or  enlargement  of the  benefits or
potential benefits intended to be made available under the Plan. Such adjustment
shall be made by the Board or the Committee, whose determination in that respect
shall be final, binding and conclusive.  Except as expressly provided herein, no
issuance  by the  Company  of  shares  of  stock  of any  class,  or  securities
convertible into shares of stock of any class,  shall affect,  and no adjustment
by reason  thereof  shall be made with respect to, the number or price of shares
of Common Stock subject to an Award.

         (b)  Dissolution  or   Liquidation.   In  the  event  of  the  proposed
dissolution or liquidation of the Company, all outstanding Awards will terminate

                                                                            -18-



immediately prior to the consummation of such proposed action,  unless otherwise
provided by the  Administrator.  The Administrator in its discretion may provide
for a Participant to have the right to exercise his or her Option,  SAR or right
to purchase Restricted Stock until ten (10) days prior to such transaction as to
all of the Awarded Stock covered thereby, including Shares as to which the Award
would not otherwise be exercisable.  In addition,  the Administrator may provide
that any Company  repurchase option or forfeiture rights applicable to any Award
shall lapse 100%, and that any Award vesting shall accelerate 100%, provided the
proposed  dissolution or  liquidation  takes place at the time and in the manner
contemplated.  To the extent it has not been previously  exercised (with respect
to Options, SARs and right to purchase Restricted Stock) or vested (with respect
to other Awards), an Award will terminate  immediately prior to the consummation
of such proposed action.

         (c) Merger or Change in Control.  In the event of a merger or Change in
Control,  each  outstanding  Award  shall  be  assumed  or an  equivalent  award
substituted  by the  successor  corporation  or a Parent  or  Subsidiary  of the
successor  corporation.  In the event that the successor  corporation refuses to
assume or substitute for the Award, the Participant  shall (i) fully vest in and
have the right to exercise the Option, SAR or right to purchase Restricted Stock
as to all of the  Awarded  Stock,  including  Shares  as to which  it would  not
otherwise  be vested or  exercisable,  and (ii) fully earn and  receive a payout
with respect to other Awards.  If an Award is not assumed or substituted  for in
the event of a merger or Change in Control,  the Administrator  shall notify the
Participant in writing or  electronically  that (i) the Option,  SAR or right to
purchase  Restricted Stock shall be fully vested and exercisable for a period of
fifteen  (15)  days  from the  date of such  notice,  and  (ii) all  outstanding
Options,  SARs and rights to purchase  Restricted Stock shall terminate upon the
expiration of such period and (iii) all other  outstanding  Awards shall be paid
out  immediately  prior to the merger or Change in Control.  For the purposes of
this paragraph,  the Award shall be considered  assumed if, following the merger
or Change in  Control,  the  assumed  Award  confers  the right to  purchase  or
receive,  for each Share of Awarded Stock subject to the Award immediately prior
to the merger or Change in Control,  the consideration  (whether stock, cash, or
other  securities  or  property)  received in the merger or Change in Control by
holders  of  Common  Stock  for each  Share  held on the  effective  date of the
transaction (and if holders were offered a choice of consideration,  the type of
consideration  chosen by the holders of a majority of the  outstanding  Shares);
provided,  however, that if such consideration  received in the merger or Change
in  Control is not  solely  common  stock of the  successor  corporation  or its
Parent,  the Administrator  may, with the consent of the successor  corporation,
provide for the  consideration  to be received  upon the  exercise (or payout or
vesting, as applicable) of the Award, for each Share of Awarded Stock subject to
the Award, to be solely common stock of the successor  corporation or its Parent
equal in fair market value to the per share consideration received by holders of
Common Stock in the merger or Change in Control.

     18.  Date of  Grant.  The  date of  grant of an  Award  shall  be,  for all
purposes,  the date on which the Administrator makes the determination  granting
such Award,  or such other  later date as is  determined  by the  Administrator.
Notice of the  determination  shall be  provided  to each  Participant  within a
reasonable time after the date of such grant.

     19. Amendment and Termination of the Plan.

                                                                            -19-



         (a) Amendment and Termination.  The Board may at any time amend, alter,
suspend or terminate the Plan.

         (b) Shareholder  Approval.  The Plan will be subject to approval by the
shareholders of the Company within twelve (12) months after the date the Plan is
adopted.  Such  shareholder  approval  will be obtained in the manner and to the
degree  required under  Applicable  Laws.  The Company shall obtain  shareholder
approval of any Plan  amendment to the extent  necessary and desirable to comply
with Applicable Laws.

         (c) Effect of  Amendment  or  Termination.  No  amendment,  alteration,
suspension  or   termination  of  the  Plan  shall  impair  the  rights  of  any
Participant,  unless mutually agreed  otherwise  between the Participant and the
Administrator,  which  agreement must be in writing (or  electronic  format) and
signed by the  Participant  and the Company.  Termination  of the Plan shall not
affect  the  Administrator's  ability  to  exercise  the  powers  granted  to it
hereunder  with  respect to Awards  granted  under the Plan prior to the date of
such termination.

     20. Conditions Upon Issuance of Shares.

         (a)  Legal  Compliance.  Shares  shall not be  issued  pursuant  to the
exercise or payout, as applicable, of an Award unless the exercise or payout, as
applicable,  of such Award and the  issuance  and  delivery of such Shares shall
comply  with  Applicable  Laws and shall be further  subject to the  approval of
counsel for the Company with respect to such compliance.

         (b)  Investment  Representations.  As a  condition  to the  exercise or
payout,  as  applicable,  of an  Award,  the  Company  may  require  the  person
exercising  such Option,  SAR or right to purchase  Restricted  Stock, or in the
case of another Award, the person receiving the payout, to represent and warrant
at the time of any such  exercise that the Shares are being  purchased  only for
investment and without any present  intention to sell or distribute  such Shares
if,  in the  opinion  of  counsel  for the  Company,  such a  representation  is
required.

     21. Inability to Obtain  Authority.  The inability of the Company to obtain
authority  from any  regulatory  body having  jurisdiction,  which  authority is
deemed by the Company's  counsel to be necessary to the lawful issuance and sale
of any Shares  hereunder,  shall relieve the Company of any liability in respect
of the failure to issue or sell such Shares as to which such requisite authority
shall not have been obtained.

     22. Severability.  Notwithstanding any contrary provision of the Plan or an
Award  to the  contrary,  if any  one or  more of the  provisions  (or any  part
thereof)  of  this  Plan  or the  Awards  shall  be  held  invalid,  illegal  or
unenforceable in any respect,  such provision shall be modified so as to make it
valid, legal and enforceable,  and the validity,  legality and enforceability of
the  remaining  provisions  (or any  part  thereof)  of the  Plan or  Award,  as
applicable, shall not in any way be affected or impaired thereby.

     23. Shareholder Approval.  Subject to Section 19 of the Plan, the Plan will
become  effective upon its adoption by the Board. It will continue in effect for

                                                                            -20-



a term of five (5) years from the date of  approval by the  shareholders  of the
Company unless terminated earlier under Section 19 of the Plan.

     24.  Non-U.S.  Employees.  Notwithstanding  anything  in  the  Plan  to the
contrary,  with respect to any  employee  who is resident  outside of the United
States,  the Administrator  may, in its sole discretion,  amend the terms of the
Plan in order to conform such terms to the  requirements of local law or to meet
the objectives of the Plan. The Administrator may, where appropriate,  establish
one or more sub-plans for this purpose.


                                                                            -21-